JPH03111561U - - Google Patents
Info
- Publication number
- JPH03111561U JPH03111561U JP1966190U JP1966190U JPH03111561U JP H03111561 U JPH03111561 U JP H03111561U JP 1966190 U JP1966190 U JP 1966190U JP 1966190 U JP1966190 U JP 1966190U JP H03111561 U JPH03111561 U JP H03111561U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- reaction chamber
- exhaust
- reaction
- exhaust chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1966190U JPH03111561U (nl) | 1990-02-28 | 1990-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1966190U JPH03111561U (nl) | 1990-02-28 | 1990-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03111561U true JPH03111561U (nl) | 1991-11-14 |
Family
ID=31522767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1966190U Pending JPH03111561U (nl) | 1990-02-28 | 1990-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03111561U (nl) |
-
1990
- 1990-02-28 JP JP1966190U patent/JPH03111561U/ja active Pending