JPS63195719U - - Google Patents
Info
- Publication number
- JPS63195719U JPS63195719U JP8779587U JP8779587U JPS63195719U JP S63195719 U JPS63195719 U JP S63195719U JP 8779587 U JP8779587 U JP 8779587U JP 8779587 U JP8779587 U JP 8779587U JP S63195719 U JPS63195719 U JP S63195719U
- Authority
- JP
- Japan
- Prior art keywords
- quartz reaction
- inner quartz
- plasma generation
- tubes
- reaction tubes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8779587U JPS63195719U (nl) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8779587U JPS63195719U (nl) | 1987-06-05 | 1987-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195719U true JPS63195719U (nl) | 1988-12-16 |
Family
ID=30945328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8779587U Pending JPS63195719U (nl) | 1987-06-05 | 1987-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195719U (nl) |
-
1987
- 1987-06-05 JP JP8779587U patent/JPS63195719U/ja active Pending