JPS643600A - Optical element and microscope using said element - Google Patents
Optical element and microscope using said elementInfo
- Publication number
- JPS643600A JPS643600A JP15866087A JP15866087A JPS643600A JP S643600 A JPS643600 A JP S643600A JP 15866087 A JP15866087 A JP 15866087A JP 15866087 A JP15866087 A JP 15866087A JP S643600 A JPS643600 A JP S643600A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- soft
- laser light
- zone plate
- fresnel zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
PURPOSE:To improve operability by installing a Fresnel zone plate for a short wavelength for the purpose of the electromagnetic wave of the wavelength belonging to a wavelength region consisting of a soft X-ray region and UV region and a Fresnel zone plate for visible light on the same plane. CONSTITUTION:A sample 6 is supported by a moving mechanism 7 and is positioned behind a mirror 4 and an optical element 8 is supported and positioned by a moving mechanism 14. He-Ne laser light 2 is first projected on the sample 6 in a state of the air in a vacuum chamber is not evacuated, i.e., in atm and the magnified image of 5mum is imaged on the Fresnel zone plate 8 by the diffracted light of the He-Ne laser light transmitted through the sample. This image is photographed by a television camera 12 and is observed by a monitor television 13. The magnified images of Al of 5mum and 0.05mum are obtd. on the same imaging plane as the image plane for the He-Ne laser light when the soft X-rays are projected on the sample after the mirror 4 is retreated and the air in a vacuum chamber 15 is evacuated. The need for focusing and aligning of the soft X-rays is thus eliminated by using the optical element which can be aligned in the atm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15866087A JPH0786559B2 (en) | 1987-06-25 | 1987-06-25 | Optical element and microscope using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15866087A JPH0786559B2 (en) | 1987-06-25 | 1987-06-25 | Optical element and microscope using the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS643600A true JPS643600A (en) | 1989-01-09 |
JPH0786559B2 JPH0786559B2 (en) | 1995-09-20 |
Family
ID=15676566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15866087A Expired - Lifetime JPH0786559B2 (en) | 1987-06-25 | 1987-06-25 | Optical element and microscope using the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0786559B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0216498A (en) * | 1988-07-04 | 1990-01-19 | Hamamatsu Photonics Kk | Radiation image magnifying and observing device |
JPH03207000A (en) * | 1990-01-10 | 1991-09-10 | Nikon Corp | Holder frame for x-ray optical element |
US5434901A (en) * | 1992-12-07 | 1995-07-18 | Olympus Optical Co., Ltd. | Soft X-ray microscope |
KR101031675B1 (en) * | 2010-11-23 | 2011-04-29 | 전남대학교산학협력단 | Three dimensions x-ray microscope structure using x-ray mirrors and the method for manufacturing x-ray mirrors |
-
1987
- 1987-06-25 JP JP15866087A patent/JPH0786559B2/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0216498A (en) * | 1988-07-04 | 1990-01-19 | Hamamatsu Photonics Kk | Radiation image magnifying and observing device |
JPH03207000A (en) * | 1990-01-10 | 1991-09-10 | Nikon Corp | Holder frame for x-ray optical element |
US5434901A (en) * | 1992-12-07 | 1995-07-18 | Olympus Optical Co., Ltd. | Soft X-ray microscope |
KR101031675B1 (en) * | 2010-11-23 | 2011-04-29 | 전남대학교산학협력단 | Three dimensions x-ray microscope structure using x-ray mirrors and the method for manufacturing x-ray mirrors |
Also Published As
Publication number | Publication date |
---|---|
JPH0786559B2 (en) | 1995-09-20 |
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