JPH0216498A - Radiation image magnifying and observing device - Google Patents

Abstract

PURPOSE:To obtain the radiation images in the respective wavelength regions of three kinds with good reproducibility without resetting a sample with the same device by providing a radiation source which emits at least two of visible light, UV rays or X-rays, a radiation image magnifying part and a photodetecting means. CONSTITUTION:The radiation source 1 is constituted of a light source of a synchrotron radiation type. This light source emits the radiation of the long wavelength region from the visible light to X-rays. A filter 2 allows transmission of only the visible light when the filter made of borosilicate glass is used; the filter allows transmission of only the UV rays and visible light when the filter made of quartz glass is used; and the filter allows transmission of only the X-rays and visible light when the filter made of polyparaxylane is used. The radiations transmit the sample 4 and are made incident to the radiation image magnifying part 6 through an incident window 5. The magnified radiation image is formed on a photodetector 12. The radiation images in the respective wavelength regions of the above-mentioned three kinds is obtd. with the same device with the good reproducibility in this way without resetting the sample.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a radiation image magnifying observation device capable of observing a sample in at least two wavelength regions of visible light, ultraviolet rays, and X-rays.

[Conventional technology]

Conventionally, radiation image magnification observation devices used in visible light, ultraviolet rays, or X-ray wavelength regions have been implemented as dedicated microscopes for each wavelength region, since the optical systems differ for each wavelength region.

For example, "Parity" (Baifukan) Vol. 01 No.
In the X-ray microscope shown in 04 (1984), X-rays from an X-ray source are incident on a sample placed at the sample setting position, and the transmitted X-rays are reflected by an oblique incidence reflector in an X-ray image magnifying section. ,
An X-ray image is formed on an X-ray film or the like. For this reason, conventional X-ray microscopes are only used for X-rays and cannot be used for observing visible light images or ultraviolet light images at all.

[Problem to be solved by the invention]

In this way, with conventional equipment, it is necessary to observe the sample using a dedicated device for each wavelength. It must be reinstalled into a separate microscope. As a result, the position of the sample shifts each time it is set, making it impossible to obtain radiation images of the same sample with good reproducibility between visible light, ultraviolet rays, or X-rays.

Therefore, the present invention aims to provide a radiation image magnification observation device that can obtain radiation images in each wavelength region of visible light, ultraviolet rays, or X-rays with good reproducibility without resetting the sample in the same device. purpose.

[Means to solve the problem]

The radiation image magnification observation device according to the present invention includes a radiation source that emits radiation in at least two wavelength regions of visible light, ultraviolet rays, or X-rays toward a sample setting position, and a radiation image formed by passing through the sample setting position. The radiation image magnifying section magnifies the radiation image, and the detection means detects the expanded radiation image in each visible light, ultraviolet, or X-ray wavelength region.

Here, a filter is interposed between the radiation source and the sample setting position or between the sample setting position and the radiation image magnifying section to selectively remove wavelength ranges of visible light, ultraviolet rays, or X-rays. Alternatively, a photoelectric conversion means sensitive to at least one of visible light, ultraviolet light, and X-rays may be provided at the imaging position of the magnified radiation image. Further, a reflecting means that can move back and forth may be provided in the optical path of the radiation in the radiation image magnifying section, and a reflected light detecting means that is sensitive to the reflected light may be provided at the image formation position of the reflected light by the reflecting means. good.

[Effect]

According to the configuration of the present invention, the radiation image can be changed appropriately between visible light, ultraviolet rays, or X-rays by replacing filters, etc., and these radiation images are focused on a detection means that can detect radiation images for each wavelength region. imaged. Therefore, it becomes possible to selectively obtain a radiation image of a sample in the wavelength range of visible light, ultraviolet rays, or X-rays.

〔Example〕

Hereinafter, the present invention will be described in detail with reference to FIGS. 1 and 2 of the accompanying drawings. In addition, in the description of the drawings, the same elements are given the same reference numerals, and redundant description will be omitted.

FIG. 1 is a configuration diagram of a radiation image magnification observation apparatus according to an embodiment of the present invention. The radiation source 1 is composed of, for example, a synchrotron radiation type light source, and this radiation source 1 emits visible light to
It emits radiation in the wavelength range that reaches the line. That is, synchrotron radiation light (SOR light) has a wavelength distribution as shown in FIG. The sample 4 provided at the set position is irradiated. Here, the filter 2 can be made of borosilicate glass, quartz glass, or polyparaxylylene (trade name: Parylene) with a thickness of several μm. When a filter made of borosilicate glass is used, ultraviolet rays and X-rays are cut and only visible light is transmitted. When one made of quartz glass is used, X-rays are cut and only ultraviolet rays and visible light are transmitted. When using polyparaxylylene, 300 to 3
Ultraviolet rays with a wavelength of approximately 000A are cut, and X-rays and visible light are transmitted.

When the radiation passes through the sample 4, a radiation image is formed, which is incident on the radiation image magnifying section 6 through the entrance window 5. Here, as the material for the entrance window 5, a material that allows X-rays, ultraviolet rays, and visible light to pass through well, but does not allow atmospheric gas to pass through is used. For example, a polypropylene film with a thickness of about 1 to 10 μm is suitable. ing. The incident radiation is reflected by the oblique incidence reflecting mirror 7, thereby magnifying the radiation image regardless of the wavelength range of the radiation. After unnecessary radiation is cut off by the stopper 8, an enlarged radiation image is formed on the photocathode 9.

Here, a reflecting mirror 10 that can move forward and backward is provided in the optical path of the radiation, and when this reflecting mirror 10 is retreated from the optical path by a support rod 11 (indicated by the solid line of the country name), the enlarged radiation image is It is designed to be imaged at 9. On the other hand, when the reflecting mirror 10 is advanced into the radiation optical path by the support rod 11 (as indicated by the dotted line in the figure), the enlarged radiation image is formed on the light receiving surface of the photodetector 12. It has become.

When an enlarged radiation image is formed on the photocathode 9, corresponding photoelectrons are emitted from the photocathode 9, and the resulting electron image is enlarged by the coils 13a and 13b. The enlarged electron image is then multiplied by the microchannel plate 14 and then focused on the fluorescent surface 15 to form an optical image. As described above, this embodiment has a structure in which the electronic image enlarging section 16 is attached to the radiation image enlarging section 6. Fluorescent surface 1
The optical image formed at 5 is captured by the camera 17 and then temporarily stored in the frame memory 18, after which the CR
A monitor 19 equipped with a T or the like is provided. On the other hand, the output signal of the photodetector 12 is also input to this monitor 19.

Next, the operation of the radiation image magnification observation apparatus shown in FIG. 1 will be explained for each detection of visible light, ultraviolet rays, and X-ray images.

First, when observing a visible light image, the filter 2 is made of borosilicate glass. And the support rod 11
is operated to move the reflecting mirror 1o into the optical path of the radiation as indicated by the dotted line in FIG. Then, of the radiation emitted from the radiation source 1, ultraviolet rays and X-rays are cut by the filter 2, and only visible light is irradiated onto the sample 4. This visible light image is magnified by the radiation image magnifying section 6, reflected by the reflecting mirror 1o, and imaged on the light receiving surface of the photodetector 12. Therefore, monitor 1
9, a visible light image of sample 4 can be observed.

After observing such a visible light image, when switching to observation of an ultraviolet image, the filter 2 is replaced with one made of quartz glass. Then, operate the support rod 11 to
0 is moved back from the optical path of the radiation as shown by the solid line in FIG. Then, among the radiation emitted from the radiation source 1, X-rays are cut by the filter 2, and only visible light and ultraviolet rays are irradiated onto the sample 4. Therefore, a visible light image and an ultraviolet image are formed on the photocathode 9, but if the photocathode 9 is designed to be sensitive only to As a result, photoelectrons are emitted. Therefore, the electronic image generated by the photoelectrons is enlarged and amplified and formed on the fluorescent surface 15, and is optically captured by the camera 17 and sent from the frame memory 18 to the monitor 19, so that the ultraviolet image of the sample 4 can be observed.

When observing an X-ray image after observing a visible light image and an ultraviolet image as described above, the filter 2 is replaced with one made of polyparaxylylene. In this way, ultraviolet rays in the wavelength range of 300 to 3000 A are cut by the filter 2, and the sample 4 is irradiated with only visible light and X-rays.

Then, a visible light image and an X-ray image are formed on the photocathode 9 similarly to the case of observing an ultraviolet light image. However, since the photocathode 9 has no sensitivity to visible light, only the X-ray image is ultimately displayed on the monitor 19.

Note that the present invention is not limited to the above embodiments, and various modifications can be made.

For example, the radiation source is not limited to an SOR light source, but a gas plasma light source, a laser plasma light source, or the like can be used as appropriate. Furthermore, it may be applicable not only to a wide wavelength range from visible light to X-rays but also, for example, from ultraviolet rays to X-rays. In this case, the reflecting mirror 10, photodetector 12, etc. can be omitted in FIG.

Furthermore, the filter 2 may be made of various materials. Furthermore, it is not essential to provide an electronic image magnifying section.

〔Effect of the invention〕

As explained in detail above, in the present invention, the radiation image can be changed appropriately between visible light, ultraviolet rays, or X-rays by replacing filters, etc., and these radiation images can be detected by a detection method that can detect radiation images for each wavelength region. The image is focused on the means. Therefore, radiation images in each wavelength region of visible light, ultraviolet rays, or X-rays can be obtained with good reproducibility without resetting the sample in the same apparatus.

Fluorescent surface, 16...Electronic image magnifying unit, 17...Camera,
18...Frame memory, 19...Monitor.

Patent applicant Hamamatsu Photonics Co., Ltd. Representative Patent Attorney
Yoshiki Hase

[Brief explanation of the drawing]

FIG. 1 is a block diagram of a radiation image magnification observation apparatus according to an embodiment of the present invention, and FIG. 2 is a wavelength distribution diagram of synchrotron radiation light.

Claims (1)

[Claims] 1. At least two of visible light, ultraviolet rays, or X-rays
a radiation source that emits radiation in two wavelength ranges toward a sample setting position; a radiation image enlarging unit that enlarges a radiation image formed by passing through the sample setting position; 1. A radiation image magnification observation device comprising: a detection means for detecting each wavelength region of ultraviolet rays or X-rays. 2. A filter is interposed between the radiation source and the sample setting position or between the sample setting position and the radiation image enlarging section, which selectively removes any wavelength range of visible light, ultraviolet rays, or X-rays. The radiographic image magnification observation device according to claim 1, wherein: 3. Visible light,
2. The radiation image magnification observation apparatus according to claim 1, further comprising photoelectric conversion means sensitive to at least one of ultraviolet rays and X-rays. 4. A reflecting means that can move back and forth is provided on the optical path of the radiation in the radiation image enlarging section, and a reflected light detecting means that is sensitive to the reflected light is provided at the imaging position of the reflected light by the reflecting means. The radiation image magnification observation apparatus according to claim 1.