JPH0221550A - X-ray image observation device - Google Patents

Abstract

PURPOSE:To enable an hourly change of a substance to be observed to be continuously observed while being able to observe an image having large magnification utilizing X-rays by thinning a supporting film to the extent not to interface with transmission of X-rays while forming a throughhole on a supporting member. CONSTITUTION:Photoelectric conversion film 42 is fixed to a supporting film 43 thin to the extent not to interfare with transmission of X-rays for being arranged inside a vacuum container 31 to perform photoelectric conversion without attenuating an expanded X-ray image in order to observe the converted image as a visible image. Thereby, observation of the enlarged image of a substance to be observed is made possible while making it possible to observe even a continuous hourly change. Further, since a throughhole 40 is formed on a supporting member 44, which supports the supporting film 43, a vacuum degree can be made equal between the side of X-ray imaging and the side of electron imaging while being able to make the supporting film 43 extremely thin.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an X-ray image observation device, and more particularly to an X-ray image observation device having a vacuum container provided with a photoelectric conversion film therein.

[Prior art]

Conventionally, in an X-ray image observation apparatus, an enlarged X-ray image is projected onto an X-ray film, and the enlarged image is observed by displaying the X-ray film. Furthermore, in order to observe particularly weak X-ray images, it is necessary to magnify and observe them within a vacuum container in order to prevent the attenuation of the X-rays. Therefore, an enlarged image of the X-ray film is taken while being fixed in a vacuum container, and then the enlarged image is observed by destroying the vacuum container, taking it out, and developing it.

In addition, there is a device for observing images by converting an X-ray image into an electronic image using a scintillator and projecting the electronic image on a phosphor screen without using an X-ray film, for example, in Japanese Patent Laid-Open No. 59
It is disclosed in the publication No.-101134.

Furthermore, the object to be measured is fixed on the X-ray entrance window of the vacuum container,
There is also a method in which an X-ray-electron conversion film is attached to the inner surface of the vacuum container on the opposite surface, the X-rays that have passed through the object to be measured are converted into electrons by the X-ray-electron conversion film, and the electron image is photographed on film. It is being

[Problems to be solved by the invention]

In the method using an X-ray film, the X-ray film must be developed in order to observe an enlarged image. For this reason, it was not possible to observe temporal changes in the object to be observed, and in order to develop the X-ray film, the vacuum container had to be destroyed and taken out. Furthermore, in the method using such an X-ray film, the reproducibility of the relationship between the amount of X-rays irradiated to the X-ray film and the degree of blackening of the film is poor; Due to the poor linearity with the degree of magnification, accurate enlarged images could not be observed.

In addition, in order for a person to view the enlarged image, the developed X-ray film must be enlarged or observed with a microscope, which requires a lot of time and effort.

On the other hand, in the device using the scintillator disclosed in the above publication, the X-ray image is not magnified within the vacuum container, so it is not possible to observe minute X-ray images, and it is not possible to observe fine X-ray images, and it cannot be magnified enough to be used as a microscope. I can't even do that.

Furthermore, in the method of attaching an X-ray-electron conversion film to the inner surface of the X-ray entrance window of a vacuum container, the thickness of this X-ray entrance window must be kept constant in order to prevent destruction due to the pressure difference between atmospheric pressure and the inside of the vacuum container. It has to be more than that.

Therefore, the X-rays are absorbed and attenuated at the entrance window, making it difficult to obtain a clear image.

Therefore, the present invention solves the above-mentioned problems, and provides an X-ray image observation device that can continuously observe temporal changes in an object to be observed, and can observe an image with a large magnification using X-rays. The purpose is to provide

[Means for solving problems]

The X-ray image observation apparatus of the present invention includes a vacuum container, an X-ray imaging means for imaging X-rays incident through an observation window of the vacuum container at a predetermined position, and an X-ray imaging device provided at an X-ray imaging position. a support film, a photoelectric conversion film attached to the support film, and a support member fixed to a vacuum container while supporting the support film so that the photoelectric conversion film is placed at an X-ray imaging position. , an electron imaging means for imaging electrons from the photoelectric conversion film at a predetermined position, the support film is thin enough not to impede transmission of X-rays, and the support member has at least one through hole. It is characterized by the formation of

Here, the supporting member may be a cylindrical body projecting toward the electronic imaging means in the vacuum container, and the through hole may be formed in the side wall of the cylindrical body. Moreover, the X-ray source may be provided in the vacuum container.

[Effect]

In the X-ray image observation device of the present invention, the photoelectric conversion film is fixed to a thin support film that does not impede the transmission of X-rays and placed in a vacuum container, so that the photoelectric conversion film can be photoelectrically converted without attenuating the magnified X-ray image. By observing the converted image as a visible image, it is possible to observe an enlarged image of the object to be observed without the need for complicated processing such as film development or enlargement, and it is possible to continuously It also makes it possible to observe temporal changes. Furthermore, since a through hole is formed in the support member that supports the support membrane, the degree of vacuum can be made the same on the X-ray imaging side and the electron imaging side.
Therefore, it becomes possible to make the support membrane extremely thin.

〔Example〕

The present invention will now be described in detail with reference to FIGS. 1 and 2 of the accompanying drawings. In the description of the drawings, the same elements are given the same reference numerals, and redundant description will be omitted.

FIG. 1 is an overall structural diagram of an X-ray image observation apparatus according to an embodiment. As shown in the figure, the apparatus of the embodiment includes an X-ray emitting section 1 serving as an X-ray source for emitting X-rays, a sample introducing section 2 for introducing a sample into a cellar, and a sample introducing section 2 for enlarging an X-ray image. an X-ray image enlarging section 3; an electronic image enlarging section 4 for enlarging the electron image;
It also includes an enlarged image observation section 5 for observing an enlarged image. The above-mentioned X-ray emitting section 1, sample introduction section 2, X-ray image enlarging section 3, and electron image enlarging section 4 are assembled into the vacuum container 100.

The X-ray emission unit 1 includes a hot cathode 12 and a target 13 provided in a vacuum chamber 11, and the vacuum chamber 11 is connected to a vacuum system via a valve 14. Sample introduction section 2 is sample chamber 2
1, a sample setting member 23 fixed to the linear introduction terminal 22, and a gate valve 24 that partitions the X-ray image enlarging section 3. is now set.

The sample chamber 21 is connected to a vacuum system via a valve 26, and can be evacuated.

The X-ray image enlarging unit 3 connects a vacuum chamber 31 formed by the vacuum container 100, an oblique incidence reflection v132 that reflects X-rays, and a light shielding plate 33 that cuts unnecessary X-rays.
is connected to the vacuum system via a valve 34. The electronic image enlarging unit 4 has a vacuum chamber 41 formed by a vacuum container 100.
a photoelectric conversion film 42 that emits electrons (photoelectrons) upon receiving X-rays; a support film 43 that supports the photoelectric conversion film 42; and a cylindrical support that supports the support film 43 and is fixed to the vacuum container 100. The vacuum chamber 41 includes a member 44, a microchannel plate 45 for multiplying electrons, a fluorescent film 46 for receiving electrons and emitting fluorescence, and coils 47 and 48 for enlarging an electron image.The vacuum chamber 41 has four valves. connected to the vacuum system via. The magnified image observation unit 5 has a relay lens 51 and an image pickup tube 52,
Furthermore, it has a frame memory, a monitor, etc. (not shown).

FIG. 2 shows an enlarged configuration of the vicinity of the photoelectric conversion film 42. As shown in the figure, the vacuum chamber 31 of the X-ray image enlarging section 3 and the vacuum chamber 41 of the electron image enlarging section 4 are partitioned by a support member 44.
A base end portion of this support member 44 is fixed to the inner surface of the vacuum container 100. The tip of the support member 44 has a cylindrical shape that protrudes toward the electronic image magnifying section 4, and a support film 43 is fixed to the tip, and the photoelectric conversion film 42 is adhered thereto. here,
The support film 43 is sufficiently thin (several μm) to allow weak X-rays to pass therethrough, and its material is X-ray transparent. Therefore, when X-rays are incident in the direction of arrow A, photoelectrons are emitted in the direction of arrow B. In addition, the support member 44
A plurality of through holes 40 are formed in the side wall of the support film 43, so that the degree of vacuum in the vacuum chamber 31 and the vacuum chamber 41 are the same, and therefore it is possible to make the support film 43 extremely thin. There is.

Next, the functions of the X-ray image observation apparatus according to the above embodiment will be sequentially explained.

First, when setting a sample, the gate valve 24 is closed as indicated by the dotted line in the figure to release the vacuum in the sample chamber 21. In this state, the linear introduction terminal 22 and the sample setting member 23 are housed in the sample chamber 21 as shown by the solid line in the figure, and the sample 25 is set in the sample setting member 23 by opening the door (not shown). Then, the door is closed, the valve 26 is opened, and the sample chamber 21 is evacuated. When the sample chamber 21 becomes evacuated, the gate valve 24 is opened as shown by the solid line in the figure, and the linear introduction terminal 22 is operated to send the sample setting member 23 to the observation position. Thereby, the sample 25 is set at a predetermined position.

Next, the hot cathode 12 is energized to emit thermoelectrons toward the target 13 . As a result, from target 13
A line is generated and directed towards the sample 25. The X-rays pass through the sample 25 and are reflected by the oblique incidence reflecting mirror 32, so that an enlarged X-ray image is formed on the photoelectric conversion film 42. Here, unnecessary X-rays are blocked by a light shielding plate 33. When an X-ray image is formed on the photoelectric conversion film 42, electrons are emitted correspondingly. This electron image shows the coil 47°48
, the electrons are amplified by a microchannel plate 45 , and an image is formed on a fluorescent film 46 . Therefore, an enlarged optical image can be obtained in the fluorescent film 46.

Here, the magnification of the oblique incidence reflector 32 is set to 20 times, the resolution on the photoelectric conversion film 42 of the electron image magnifying section 4 is set to 1 μm, and the magnification of the electron lens composed of the coils 47 and 48 is set to 100 times. Then, the resolution on the sample 25 is 1 μm
/20-50 nm, and 50 nm on the sample 25 is expanded to 0.1 mm on the fluorescent film 46.

Furthermore, the enlarged image formed on the fluorescent film 46 is captured by a TV camera (image pickup tube 52) through a relay lens 51, and the enlarged image captured by this TV camera is converted into an electric video signal and then output as a video signal. sent to frame memory. This video frame memory A/D converts the electric video signal sent and integrates it for a certain period of time. Then, the integrated results are sent to the monitor. This monitor creates a visible image from the integrated results. Fluorescent film 4 with this TV camera
By capturing the visible image formed on 6, it is possible to easily see 50 nm on the sample on the monitor. That is, the magnification of the relay lens 51 is 1x, the size of the input surface of the TV camera 52 is 10 mm x 10 mm,
Assuming that the monitor screen is 20cm x 20cm, this X-ray microscope has a total area of 20X100X20-4000.
A magnification of 0x can be obtained.

Furthermore, if the X-ray image has sufficient intensity, one image can be obtained every 1/30 seconds, which is the typical time resolution of a TV camera, without using video frame memory. It becomes possible to observe X-ray images in almost real time. However, when the X-ray image is weak, a good image can be obtained by A/D converting the electrical video signal using a video frame memory and integrating the signals, as in the embodiment described above. There is a need to. In this case, although it is not possible to observe an enlarged image in real time, continuous observation is possible.

The present invention is not limited to the above embodiments, and various modifications are possible.

For example, regarding the structure of the photoelectric conversion film 42 and the support film 43, the support 44 made of glass, metal, Si, etc.
Paste a N4 film, organic thin film, etc. (parylene, etc.),
A thin film of Au may be deposited thereon. Furthermore, instead of the Au thin film that can directly convert X-rays into electrons, a two-layer structure of cesium iodide and antimony cesium may be used to indirectly convert X-rays into photoelectrons.

In the above embodiment, an oblique incidence X-ray reflector is used to enlarge the X-ray image, but in the apparatus of the present invention, an X-ray zone plate or a multilayer X-ray reflector is used to enlarge the X-ray image. Good too. Furthermore, when the incident X-ray intensity is sufficiently high, it is not essential to provide a microchannel plate, and in addition, the fluorescent film 4
A CCD device may be provided at position 6 to obtain image information. Further, in the above embodiment, an example in which the image is enlarged has been described, but the present invention can also be applied to a case where the image is enlarged to the same size, that is, the image is not enlarged.

〔Effect of the invention〕

As explained in detail above, in the present invention, X-rays can be photoelectrically converted and further observed as a visible image, so an enlarged image can be obtained without the need for complicated processing such as developing and enlarging an X-ray film. Furthermore, it becomes possible to observe changes in the enlarged image of the object in real time.

Furthermore, since the X-ray image is enlarged and then converted into an electron image, and this electron image is further enlarged to form a visible image, a very large magnification can be obtained.

In addition, since the X-ray image can ultimately be converted into an electrical signal, even a very weak X-ray image can be clearly visualized by integrating the electrical signals corresponding to the photoelectrons emitted from the photoelectric conversion film. Enlarged images can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a side configuration diagram of an embodiment according to the present invention, and FIG. 2 is an enlarged side view of the vicinity of the photoelectric film shown in FIG. 1. DESCRIPTION OF SYMBOLS 1... X-ray emission part, 11... Vacuum chamber, 12... Hot cathode, 13... Target, 2... Sample introduction part, 2
1... Sample chamber, 22... Linear introduction terminal, 23...
Sample setting member, 24...gate valve, 25...
Sample, 3... X-ray image magnifying section, 31... Vacuum chamber, 32
... Oblique incidence reflector, 33 ... Light shielding plate, 4 ... Electronic image magnifying section, 41 ... Vacuum chamber, 42 ... Photoelectric conversion film,
43... Support film, 44... Support member, 45... Macro channel plate, 46... Fluorescent film 46.5
... Enlarged image observation section, 51... Relay lens, 52.
...TV left camera patent applicant Patent attorney representing Hamamatsu Photonics Co., Ltd.
Yoshi Hase Figure 2 Structure near the tree photoelectric conversion film

Claims (1)

[Claims] 1. A vacuum container; an X-ray imaging means for imaging X-rays incident through an observation window of the vacuum container at a predetermined position; a support film, a photoelectric conversion film adhered to the support film, and a support fixed to the vacuum container while supporting the support film so that the photoelectric conversion film is located at the imaging position of the X-rays. member, and an electron imaging means for imaging electrons from the photoelectric conversion film at a predetermined position, the support film is thin enough not to impede transmission of the X-rays, and the support film An X-ray image observation device characterized in that at least one through hole is formed. 2. Claim 1, wherein the support member has a cylindrical body projecting toward the electronic imaging means in the vacuum container, and the through hole is formed in a side wall of the cylindrical body. X-ray image observation device. 3. The X-ray image observation apparatus according to claim 1, wherein the vacuum container houses an X-ray source, and the X-ray source and the X-ray imaging means are separated by an observation window member. .