JPS6435655U - - Google Patents
Info
- Publication number
- JPS6435655U JPS6435655U JP13080887U JP13080887U JPS6435655U JP S6435655 U JPS6435655 U JP S6435655U JP 13080887 U JP13080887 U JP 13080887U JP 13080887 U JP13080887 U JP 13080887U JP S6435655 U JPS6435655 U JP S6435655U
- Authority
- JP
- Japan
- Prior art keywords
- gate valve
- high vacuum
- sample chamber
- pressure
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 108010083687 Ion Pumps Proteins 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13080887U JPS6435655U (Direct) | 1987-08-27 | 1987-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13080887U JPS6435655U (Direct) | 1987-08-27 | 1987-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6435655U true JPS6435655U (Direct) | 1989-03-03 |
Family
ID=31386306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13080887U Pending JPS6435655U (Direct) | 1987-08-27 | 1987-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6435655U (Direct) |
-
1987
- 1987-08-27 JP JP13080887U patent/JPS6435655U/ja active Pending
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