JPS6435311A - Profile controller for body in optional shape - Google Patents

Abstract

PURPOSE:To shorten a measurement time without being affected by the shape of a body to be measured and to improve accuracy by operating the normal direction of the abutting point of a probe in a direction to be measured and operating the coordinates of a target movement point according to it. CONSTITUTION:When the probe 101 abuts on a surface to be measured, a normal direction arithmetic means 105 operates the normal direction of the abutting point of the probe 101 on the surface to be measured with the output signal of a force detecting means 103. A target coordinate arithmetic means 106 operates the coordinates of plural target movement points on an arcuate track at a distance of a specific radius at right angles to the normal direction found in a yz plane or at a specific angle to the direction. A driving control means 107 outputs a driving signal to a driving means 102 according to the arithmetic result and moves the probe 101 to the target movement points in order to make the probe 101 abut on the surface to be measured.