JPS643451Y2 - - Google Patents
Info
- Publication number
- JPS643451Y2 JPS643451Y2 JP6155686U JP6155686U JPS643451Y2 JP S643451 Y2 JPS643451 Y2 JP S643451Y2 JP 6155686 U JP6155686 U JP 6155686U JP 6155686 U JP6155686 U JP 6155686U JP S643451 Y2 JPS643451 Y2 JP S643451Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- liquid
- way solenoid
- vacuum
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 21
- 238000007872 degassing Methods 0.000 claims description 9
- 238000007599 discharging Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Degasification And Air Bubble Elimination (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6155686U JPS643451Y2 (en:Method) | 1986-04-22 | 1986-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6155686U JPS643451Y2 (en:Method) | 1986-04-22 | 1986-04-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62174606U JPS62174606U (en:Method) | 1987-11-06 |
| JPS643451Y2 true JPS643451Y2 (en:Method) | 1989-01-30 |
Family
ID=30895002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6155686U Expired JPS643451Y2 (en:Method) | 1986-04-22 | 1986-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS643451Y2 (en:Method) |
-
1986
- 1986-04-22 JP JP6155686U patent/JPS643451Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62174606U (en:Method) | 1987-11-06 |
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