JPS6434133U - - Google Patents

Info

Publication number
JPS6434133U
JPS6434133U JP13072387U JP13072387U JPS6434133U JP S6434133 U JPS6434133 U JP S6434133U JP 13072387 U JP13072387 U JP 13072387U JP 13072387 U JP13072387 U JP 13072387U JP S6434133 U JPS6434133 U JP S6434133U
Authority
JP
Japan
Prior art keywords
slider
guide
control device
longitudinal direction
automatic machines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13072387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0753867Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987130723U priority Critical patent/JPH0753867Y2/ja
Publication of JPS6434133U publication Critical patent/JPS6434133U/ja
Application granted granted Critical
Publication of JPH0753867Y2 publication Critical patent/JPH0753867Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Bearings For Parts Moving Linearly (AREA)
JP1987130723U 1987-08-27 1987-08-27 各種自動機械の送り等制御装置 Expired - Lifetime JPH0753867Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987130723U JPH0753867Y2 (ja) 1987-08-27 1987-08-27 各種自動機械の送り等制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987130723U JPH0753867Y2 (ja) 1987-08-27 1987-08-27 各種自動機械の送り等制御装置

Publications (2)

Publication Number Publication Date
JPS6434133U true JPS6434133U (hr) 1989-03-02
JPH0753867Y2 JPH0753867Y2 (ja) 1995-12-13

Family

ID=31386149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987130723U Expired - Lifetime JPH0753867Y2 (ja) 1987-08-27 1987-08-27 各種自動機械の送り等制御装置

Country Status (1)

Country Link
JP (1) JPH0753867Y2 (hr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005325880A (ja) * 2004-05-13 2005-11-24 Nippon Thompson Co Ltd スライド装置
JP2006307924A (ja) * 2005-04-27 2006-11-09 Nippon Thompson Co Ltd 直動案内ユニット
CN114310018A (zh) * 2021-12-28 2022-04-12 绍兴奥美电子科技有限公司 一种离子刻蚀直线微调机构及其制造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58202207A (ja) * 1982-05-18 1983-11-25 Matsushita Electric Ind Co Ltd 移送装置
JPS61236443A (ja) * 1985-04-10 1986-10-21 Hiroshi Teramachi テ−ブル移送装置
JPS62152641A (ja) * 1985-12-26 1987-07-07 Matsushita Electric Ind Co Ltd 直交系ロボツト

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58202207A (ja) * 1982-05-18 1983-11-25 Matsushita Electric Ind Co Ltd 移送装置
JPS61236443A (ja) * 1985-04-10 1986-10-21 Hiroshi Teramachi テ−ブル移送装置
JPS62152641A (ja) * 1985-12-26 1987-07-07 Matsushita Electric Ind Co Ltd 直交系ロボツト

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005325880A (ja) * 2004-05-13 2005-11-24 Nippon Thompson Co Ltd スライド装置
JP4500102B2 (ja) * 2004-05-13 2010-07-14 日本トムソン株式会社 スライド装置
JP2006307924A (ja) * 2005-04-27 2006-11-09 Nippon Thompson Co Ltd 直動案内ユニット
JP4523870B2 (ja) * 2005-04-27 2010-08-11 日本トムソン株式会社 直動案内ユニット
CN114310018A (zh) * 2021-12-28 2022-04-12 绍兴奥美电子科技有限公司 一种离子刻蚀直线微调机构及其制造方法

Also Published As

Publication number Publication date
JPH0753867Y2 (ja) 1995-12-13

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