JPS6433819A - Manufacture of conductive oxide metal film - Google Patents
Manufacture of conductive oxide metal filmInfo
- Publication number
- JPS6433819A JPS6433819A JP10345388A JP10345388A JPS6433819A JP S6433819 A JPS6433819 A JP S6433819A JP 10345388 A JP10345388 A JP 10345388A JP 10345388 A JP10345388 A JP 10345388A JP S6433819 A JPS6433819 A JP S6433819A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- organic
- compound
- fluorine
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemically Coating (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Abstract
PURPOSE:To obtain a low cost oxide metal film having good conductivity by applying a solution including an organic metal compound and a metal fluoride as a fluorine dopant source on the surface of a substrate, and then heating the liquid to form an oxide metal film doped with fluorine on the substrate. CONSTITUTION:A solution including an organic metal compound and a metal fluoride as a fluorine dopant source is applied on a substrate, and then the solution is heated in an atmosphere including oxygen to form an oxide metal film doped by fluorine on the substrate. It is used as the organic metal compound that is a compound, where metal atom and organic radical are combined by means of oxygen, such as a compound whose decomposition temperature is low, i.e. organic acid salt, metal soap, chelete complex or the like. It is, on the other hand, used as the metal fluoride that is a metal fluoride or organic metal compound including fluorine corresponding to the metal of metal oxide film to be formed. It is therefore possible to obtain the member which is satisfactory as a conductive film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10345388A JPS6433819A (en) | 1987-04-24 | 1988-04-25 | Manufacture of conductive oxide metal film |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10295387 | 1987-04-24 | ||
JP10345388A JPS6433819A (en) | 1987-04-24 | 1988-04-25 | Manufacture of conductive oxide metal film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6433819A true JPS6433819A (en) | 1989-02-03 |
Family
ID=26443632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10345388A Pending JPS6433819A (en) | 1987-04-24 | 1988-04-25 | Manufacture of conductive oxide metal film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6433819A (en) |
-
1988
- 1988-04-25 JP JP10345388A patent/JPS6433819A/en active Pending
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