JPS6433819A - Manufacture of conductive oxide metal film - Google Patents

Manufacture of conductive oxide metal film

Info

Publication number
JPS6433819A
JPS6433819A JP10345388A JP10345388A JPS6433819A JP S6433819 A JPS6433819 A JP S6433819A JP 10345388 A JP10345388 A JP 10345388A JP 10345388 A JP10345388 A JP 10345388A JP S6433819 A JPS6433819 A JP S6433819A
Authority
JP
Japan
Prior art keywords
metal
organic
compound
fluorine
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10345388A
Other languages
Japanese (ja)
Inventor
Toshiro Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP10345388A priority Critical patent/JPS6433819A/en
Publication of JPS6433819A publication Critical patent/JPS6433819A/en
Pending legal-status Critical Current

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Landscapes

  • Chemically Coating (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)

Abstract

PURPOSE:To obtain a low cost oxide metal film having good conductivity by applying a solution including an organic metal compound and a metal fluoride as a fluorine dopant source on the surface of a substrate, and then heating the liquid to form an oxide metal film doped with fluorine on the substrate. CONSTITUTION:A solution including an organic metal compound and a metal fluoride as a fluorine dopant source is applied on a substrate, and then the solution is heated in an atmosphere including oxygen to form an oxide metal film doped by fluorine on the substrate. It is used as the organic metal compound that is a compound, where metal atom and organic radical are combined by means of oxygen, such as a compound whose decomposition temperature is low, i.e. organic acid salt, metal soap, chelete complex or the like. It is, on the other hand, used as the metal fluoride that is a metal fluoride or organic metal compound including fluorine corresponding to the metal of metal oxide film to be formed. It is therefore possible to obtain the member which is satisfactory as a conductive film.
JP10345388A 1987-04-24 1988-04-25 Manufacture of conductive oxide metal film Pending JPS6433819A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10345388A JPS6433819A (en) 1987-04-24 1988-04-25 Manufacture of conductive oxide metal film

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10295387 1987-04-24
JP10345388A JPS6433819A (en) 1987-04-24 1988-04-25 Manufacture of conductive oxide metal film

Publications (1)

Publication Number Publication Date
JPS6433819A true JPS6433819A (en) 1989-02-03

Family

ID=26443632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10345388A Pending JPS6433819A (en) 1987-04-24 1988-04-25 Manufacture of conductive oxide metal film

Country Status (1)

Country Link
JP (1) JPS6433819A (en)

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