JPS6433474A - Cooling device and operating method thereof - Google Patents

Cooling device and operating method thereof

Info

Publication number
JPS6433474A
JPS6433474A JP18755287A JP18755287A JPS6433474A JP S6433474 A JPS6433474 A JP S6433474A JP 18755287 A JP18755287 A JP 18755287A JP 18755287 A JP18755287 A JP 18755287A JP S6433474 A JPS6433474 A JP S6433474A
Authority
JP
Japan
Prior art keywords
expansion device
motor
power source
cold
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18755287A
Other languages
Japanese (ja)
Other versions
JP2507452B2 (en
Inventor
Norihide Saho
Yukiyoshi Yoshimatsu
Tadashi Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62187552A priority Critical patent/JP2507452B2/en
Publication of JPS6433474A publication Critical patent/JPS6433474A/en
Application granted granted Critical
Publication of JP2507452B2 publication Critical patent/JP2507452B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

PURPOSE: To enable quick heating of an expansion device as cold generating part by a method which has a process to heat the expansion device by reversing the procedure of supplying a refrigerant gas to the expansion device. CONSTITUTION: In the regeneration of a cryogenic pump, a valve provided between a flange 41 and a chamber desired to exhaust and a regenerated gas is introduced from a regenerated gas introduction port 43 provided at a vacuum tank 40 is introduced to be exhausted at an exhaust port 42 while an expansion device starts its heating operation. In the heating operation of the expansion device, a signal for switching the power source is sent by a controller 60 to a motor power source 62 for the reversion of a motor 20 to reverse the motor 20 with a controller 60 so that a rotary valve is turned oppositely. As a result, the rotary valve 21 is switched to four processes of 0, 1/4, 1/2 and 3/4 on the opposite side. Cold stages 31a and 31b arranged respectively at expansion chambers 38a and 38b parts are heated to accomplish quick heating of panels 44 and 46 mounted on the cold stages 31a and 31b individually to a normal temperature.
JP62187552A 1987-07-29 1987-07-29 Cooling device and operating method thereof Expired - Fee Related JP2507452B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62187552A JP2507452B2 (en) 1987-07-29 1987-07-29 Cooling device and operating method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62187552A JP2507452B2 (en) 1987-07-29 1987-07-29 Cooling device and operating method thereof

Publications (2)

Publication Number Publication Date
JPS6433474A true JPS6433474A (en) 1989-02-03
JP2507452B2 JP2507452B2 (en) 1996-06-12

Family

ID=16208076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62187552A Expired - Fee Related JP2507452B2 (en) 1987-07-29 1987-07-29 Cooling device and operating method thereof

Country Status (1)

Country Link
JP (1) JP2507452B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004018947A1 (en) * 2002-08-20 2004-03-04 Sumitomo Heavy Industries, Ltd. Very low temperature refrigerator

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7127901B2 (en) 2001-07-20 2006-10-31 Brooks Automation, Inc. Helium management control system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4339927A (en) * 1981-07-06 1982-07-20 Oerlikon-Burhle U.S.A. Inc. Gas-driven fluid flow control valve and cryopump incorporating the same
JPS58214758A (en) * 1982-06-07 1983-12-14 エーピーディー．クライオジェニックス．インコーポレーテッド Cryogenic refrigerator
JPS60192886A (en) * 1985-02-15 1985-10-01 Hitachi Ltd Cold accumulator type refrigerator
JPS60194264A (en) * 1984-03-06 1985-10-02 シ−ヴイ−アイ・インコ−ポレイテツド Cryogenic refrigerator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4339927A (en) * 1981-07-06 1982-07-20 Oerlikon-Burhle U.S.A. Inc. Gas-driven fluid flow control valve and cryopump incorporating the same
JPS58214758A (en) * 1982-06-07 1983-12-14 エーピーディー．クライオジェニックス．インコーポレーテッド Cryogenic refrigerator
JPS60194264A (en) * 1984-03-06 1985-10-02 シ−ヴイ−アイ・インコ−ポレイテツド Cryogenic refrigerator
JPS60192886A (en) * 1985-02-15 1985-10-01 Hitachi Ltd Cold accumulator type refrigerator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004018947A1 (en) * 2002-08-20 2004-03-04 Sumitomo Heavy Industries, Ltd. Very low temperature refrigerator
CN100439819C (en) * 2002-08-20 2008-12-03 住友重机械工业株式会社 Cryogenic refrigerator

Also Published As

Publication number Publication date
JP2507452B2 (en) 1996-06-12

Similar Documents

Publication Publication Date Title
CN200985338Y (en) Multifunctional heat treating vacuum furnace
CN101153401A (en) Vacuum carburization processing method and vacuum carburization processing apparatus
JPH09152268A (en) Freeze dryer
JPS6433474A (en) Cooling device and operating method thereof
JP2000017305A (en) Degreasing sintering furnace
ES2184376T3 (en) PROCEDURE FOR THE THERMAL TREATMENT OF METAL WORK PIECES.
CN2417181Y (en) Micro-pulsation plasma nitriding hot wall stove
SE9803191L (en) Method and apparatus for heat isostatic pressing
ES2159710T3 (en) OVEN FOR THE THERMAL TREATMENT OF LOADS OF METAL WORK PARTS.
JP2787503B2 (en) Plasma processing equipment
WO1997023715A3 (en) Process for operating a gas turbine and gas turbine operating in this way
JPH06234025A (en) Hot bulging method
SU1448185A1 (en) Method and apparatus for heat treatment of articles
JPS62167818A (en) Gas cooling type vacuum heat treatment furnace
JPS5766642A (en) Plasma etching device
CA2003181A1 (en) Reduced pressure steam heat treating device
JPH09273864A (en) Heat treatment furnace
JPH03188213A (en) Heat treatment furnace
CN116293739A (en) Control logic of RTO waste gas treatment system
SU1343097A1 (en) Device for obtaining mechanical work
GB867249A (en) Improvements in or relating to methods of and apparatus for brazing and heat treating articles
JPS567629A (en) Water making apparatus
JPS6118429A (en) Pressurized apparatus provided with energy conservation tank
GB2239699A (en) Method and installation for roasting (a) mineral material(s)
CN100432593C (en) Structure for preventing kimchi refrigerator from dewing

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees