JPH09273864A - Heat treatment furnace - Google Patents

Heat treatment furnace

Info

Publication number
JPH09273864A
JPH09273864A JP8037496A JP8037496A JPH09273864A JP H09273864 A JPH09273864 A JP H09273864A JP 8037496 A JP8037496 A JP 8037496A JP 8037496 A JP8037496 A JP 8037496A JP H09273864 A JPH09273864 A JP H09273864A
Authority
JP
Japan
Prior art keywords
furnace
refrigerant
gas
container
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP8037496A
Other languages
Japanese (ja)
Inventor
Eiji Nakamu
栄治 中務
Masao Takeda
正夫 武田
Ippei Yamauchi
一平 山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Mectem Inc
Original Assignee
Shimadzu Mectem Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Mectem Inc filed Critical Shimadzu Mectem Inc
Priority to JP8037496A priority Critical patent/JPH09273864A/en
Publication of JPH09273864A publication Critical patent/JPH09273864A/en
Withdrawn legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To effectively perform quick cooling in a furnace after heat treatment. SOLUTION: Nitrogen is stored in a liquefied nitrogen gas bomb 7 in a liquefied state, and, after taking it out as necessary, the liquefied nitrogen is put into the easily gasifiable condition by an atomizer 6 to be introduced into a container 1. Accordingly, even in the case where the internal volume of the liquefied nitrogen gas bomb 7 and an introduction pipe are made smaller in size, the liquefied nitrogen is explosively expanded in the container 1 after introduction, and the container 1 can be quickly filled with a nitrogen gas having a predetermined pressure.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、熱処理後に炉内の
急速冷却を効果的に行い得るようにした熱処理炉に関す
るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat treatment furnace capable of effectively performing rapid cooling in the furnace after heat treatment.

【0002】[0002]

【従来の技術】熱処理炉のなかには、焼き入れなどの急
冷を冷却ガスを使用することによって行う手法が従来よ
り確立されている。このような熱処理炉は、炉内を真空
排気する排気系と、炉内に装入された処理物を加熱する
加熱手段と、加熱後の炉内に冷却ガスを導入するガス導
入系路と、導入された冷却ガスを送風する冷却ファンと
を備え、熱処理を終えた処理物に冷却ファンから冷却ガ
スを吹き付けることにより、処理物から効率良く熱を奪
って冷却することができるようにしている。
2. Description of the Related Art In a heat treatment furnace, a method for quenching, such as quenching, by using a cooling gas has been conventionally established. Such a heat treatment furnace, an exhaust system for evacuating the inside of the furnace, a heating means for heating the processed material charged in the furnace, a gas introduction system path for introducing a cooling gas into the furnace after heating, A cooling fan that blows the introduced cooling gas is provided, and by blowing the cooling gas from the cooling fan to the processed product that has undergone the heat treatment, it is possible to efficiently remove heat from the processed product and cool it.

【0003】[0003]

【発明が解決しようとする課題】ところで、かかる冷却
ガスを供給するために、従来の熱処理炉はガス導入系路
の始端にサージタンクを設け、このサージタンクに冷却
ガスを高圧状態で封入するとともに、熱処理完了後にバ
ルブを開いて内部の冷却ガスを炉内に送り込むようにし
ている。
In order to supply such cooling gas, a conventional heat treatment furnace is provided with a surge tank at the beginning of a gas introduction system passage, and the surge tank is filled with the cooling gas in a high pressure state. After the heat treatment is completed, the valve is opened to send the cooling gas inside into the furnace.

【0004】ところが、このような手法では、炉内圧が
炉とサージタンクの相対的な容積関係で決まるため、炉
内圧を高くして冷却効率を高めるためには、大きいサー
ジタンクを設置する必要がある。このため、装置全体の
大型化を招くほか、スペースファクタの低下、コストの
上昇など様々な不具合を伴うという問題がある。また、
サージタンクを大きくしても、タンクの内圧以上の圧力
を炉内に生成することはできない。また、ガス導入を短
時間で完了するために、配管を太くすることが行われて
いるが、このようにするとガスが炉内に急激に突入する
ことによる風圧で炉内構成要素、例えば脆弱なグラファ
イトフェルト等で構成される断熱材等が簡単に損傷する
恐れがある。
However, in such a method, since the furnace pressure is determined by the relative volume relationship between the furnace and the surge tank, it is necessary to install a large surge tank in order to increase the furnace pressure and increase the cooling efficiency. is there. For this reason, there is a problem that not only the size of the entire apparatus is increased, but also various problems such as a reduction in space factor and an increase in cost are involved. Also,
Even if the surge tank is made large, it is not possible to generate a pressure higher than the internal pressure of the tank in the furnace. In addition, in order to complete the gas introduction in a short time, it is practiced to thicken the pipe, but when this is done, the gas pressure suddenly enters the furnace and the wind pressure caused by the gas causes the furnace internal components, for example, fragile gas. There is a risk that the heat insulating material such as graphite felt may be easily damaged.

【0005】[0005]

【課題を解決するための手段】上記の問題点を解決する
ために、本発明は、冷媒を液化状態で貯溜しておき、必
要に応じて取り出した後、気化し易い状態にして炉内に
導くこととしている。
SUMMARY OF THE INVENTION In order to solve the above problems, the present invention stores a refrigerant in a liquefied state, takes it out if necessary, and then puts it in a state in which it is easily vaporized into a furnace. I am going to guide you.

【0006】[0006]

【発明の実施の形態】すなわち、本発明の熱処理炉は、
炉内を真空排気する排気系と、炉内に装入された処理物
を加熱する加熱手段と、加熱後の炉内に冷媒を導入する
冷媒導入系路と、導入された冷媒を処理物に向かって送
風する冷却ファンとを具備してなるものにおいて、前記
冷媒導入系路に霧化器を介して冷媒が液化状態で貯溜さ
れた冷媒容器を断接切替可能に接続したものである。
BEST MODE FOR CARRYING OUT THE INVENTION That is, the heat treatment furnace of the present invention is
An exhaust system for evacuating the inside of the furnace, a heating means for heating the processed material charged in the furnace, a refrigerant introduction system path for introducing a refrigerant into the furnace after heating, and the introduced refrigerant to the processed material. A cooling fan that blows air toward the cooling fan is connected to the refrigerant introduction system path through an atomizer so that a refrigerant container in which the refrigerant is stored in a liquefied state can be switched between open and closed.

【0007】このような構成のものであれば、冷媒の液
化時と気化時との体積比を利用して、実質的な冷媒貯溜
量は同じでも冷媒容器を従来のサージタンクに比べて格
段に小さい内容積のもので済ませることができる。しか
も、冷媒を高温の炉内に霧状で導入することで、導入時
の体積を抑えながら導入後に冷媒を爆発的に膨張させて
瞬時に高圧のガス雰囲気を作り出すことができ、小さい
配管で極めて効率の良いガス導入が行える上に、炉内構
成要素に局所的なダメージを与える風圧の発生も有効に
回避することができる。その上、炉内において冷媒が気
化する際、周囲から気化熱を奪うため、当初よりガス状
態にある冷媒を導入する場合に比べて、冷媒の持つ冷却
能力を最大限に有効利用することが可能となる。
With such a construction, the volume ratio of the refrigerant when liquefied and when the gas is vaporized is utilized to make the refrigerant container much more effective than the conventional surge tank even though the refrigerant storage amount is substantially the same. It can be done with a small internal volume. Moreover, by introducing the refrigerant in a mist state into the high-temperature furnace, the refrigerant can be explosively expanded after the introduction while suppressing the volume at the time of introduction to instantly create a high-pressure gas atmosphere. In addition to efficient gas introduction, it is possible to effectively avoid generation of wind pressure that locally damages the components inside the furnace. Moreover, when the refrigerant vaporizes in the furnace, the heat of vaporization is taken from the surroundings, so the cooling capacity of the refrigerant can be utilized to the maximum extent as compared with the case of introducing the refrigerant in the gas state from the beginning. Becomes

【0008】[0008]

【実施例】以下、本発明の一実施例を、図面を参照して
説明する。この熱処理炉は、容器1内を真空排気する排
気系2と、容器1内に装入された処理物Wを加熱する加
熱手段3と、加熱後の容器1内に冷媒たる窒素を導入す
る冷媒導入系路4と、導入された窒素を処理物Wに向か
って送風する冷却ファン5とを具備している。
An embodiment of the present invention will be described below with reference to the drawings. In this heat treatment furnace, an exhaust system 2 for evacuating the inside of the container 1, a heating means 3 for heating a processed material W loaded in the container 1, and a refrigerant for introducing nitrogen as a refrigerant into the container 1 after heating. It is provided with an introduction system passage 4 and a cooling fan 5 for blowing the introduced nitrogen toward the processed material W.

【0009】具体的に説明すると、容器1は、円筒体状
をなしその周壁に炉心に向かってノズル11aが形成さ
れた断熱本体11と、この断熱本体11の両開口端を蓋
封する断熱蓋12、13とを内有している。断熱本体1
1及び断熱蓋12、13は、例えばグラファイトフェル
ト等によって作られたもので、内部に熱処理空間S1を
閉成しており、この熱処理空間S1に処理物Wを装入す
るために一方の断熱蓋12が容器1の一端に設けた処理
物出入用の扉1aとともに断熱本体11の開口部に対し
て着脱可能とされている。この断熱蓋12、13は冷却
時に図示しない開閉用シリンダに駆動されて開閉するダ
ンパとしての役割をも担っている。また、断熱本体11
と容器1の間には、ガイド14によって部分的に包囲さ
れたガス冷却空間S2が形成してあり、このガス冷却空
間S2の一部に熱交換器15を配設している。このガス
冷却空間S2は、断熱蓋12、13を開成した際に熱処
理空間S1と連通する。一方、ノズル11aはガイド1
4の一部の開口を介して断熱本体11の外側の送風空間
S3と連通するようになっている。
More specifically, the container 1 has a cylindrical shape and a heat insulating main body 11 having a nozzle 11a formed on its peripheral wall toward the core, and a heat insulating cover for sealing both open ends of the heat insulating main body 11. It has 12 and 13 inside. Insulated body 1
1 and the heat insulating lids 12 and 13 are made of, for example, graphite felt, and have a heat treatment space S1 closed therein, and one heat insulating lid is used to load a treatment object W into the heat treatment space S1. A container 12 is attached to and detached from the opening of the heat insulating main body 11 together with a door 1a for loading and unloading the processed material provided at one end of the container 1. The heat insulating lids 12 and 13 also serve as dampers that are opened and closed by being driven by an opening / closing cylinder (not shown) during cooling. Also, the heat insulating body 11
A gas cooling space S2 partially surrounded by a guide 14 is formed between the container 1 and the container 1, and a heat exchanger 15 is arranged in a part of the gas cooling space S2. The gas cooling space S2 communicates with the heat treatment space S1 when the heat insulating lids 12, 13 are opened. On the other hand, the nozzle 11a is the guide 1
4 communicates with the blower space S3 outside the heat insulating main body 11 through a part of the openings 4.

【0010】排気系2は、この実施例ではメカニカルブ
ースタポンプ21と油回転真空ポンプ22とを直列に接
続した構造からなるもので、バルブ23を介して容器1
内に断接切替可能に接続されている。加熱手段3は、処
理物を熱処理に応じた温度(例えば千度程度)に加熱で
きる能力を備えたシーズヒータやグラファイトヒータな
どから構成されるもので、前記熱処理空間S1の内部で
あって処理物Wを取り巻く位置に配設されている。
In this embodiment, the exhaust system 2 has a structure in which a mechanical booster pump 21 and an oil rotary vacuum pump 22 are connected in series, and a container 1 is provided via a valve 23.
It is connected inside so that it can be switched on and off. The heating means 3 is composed of a sheathed heater, a graphite heater, or the like having the ability to heat the object to be processed to a temperature (for example, about 1,000 degrees) corresponding to the heat treatment, and is inside the heat treatment space S1 and is an object to be processed. It is arranged at a position surrounding W.

【0011】冷媒導入系路4は、熱処理を終えた炉内の
熱処理空間S1に冷媒たる窒素ガスを送り込むためのも
ので、その終端が前記ガス冷却空間S2に臨む位置に接
続されている。この冷媒導入系路4には、系路途中にバ
ルブ41を介してベンチュリ・ノズル構造の霧化器6が
接続してあり、この霧化器6のベンチュリ部61をバル
ブ71を介して窒素ガスを液化状態で貯溜する冷媒容器
たる液体窒素ガスボンベ7の液相部に接続するととも
に、前記霧化器6のベンチュリ入口部62に小型サージ
タンク8を接続している。また、この小型サージタンク
8の出口側はバルブ81を介して前記液体窒素ガスボン
ベ7の気相部に接続してあり、窒素ガスを所定圧で貯溜
するようになっている。
The refrigerant introducing passage 4 is for feeding nitrogen gas, which is a refrigerant, into the heat treatment space S1 in the furnace after the heat treatment, and its end is connected to a position facing the gas cooling space S2. An atomizer 6 having a venturi-nozzle structure is connected to the refrigerant introduction path 4 via a valve 41 in the middle of the path, and the venturi portion 61 of the atomizer 6 is connected via a valve 71 to nitrogen gas. Is connected to a liquid phase portion of a liquid nitrogen gas cylinder 7 which is a refrigerant container for storing in a liquefied state, and a small surge tank 8 is connected to a venturi inlet portion 62 of the atomizer 6. The outlet side of the small surge tank 8 is connected to the gas phase portion of the liquid nitrogen gas cylinder 7 via a valve 81 so that nitrogen gas is stored at a predetermined pressure.

【0012】冷却ファン5は、前記ガス冷却空間S2の
熱交換器15に臨む位置に配設されるとともに、その軸
部が容器1を貫通して炉外のモータ51に連結されてい
る。そして、このモータ51の駆動により、前記ガス冷
却空間S2に存在するガスを炉心方向から吸い込んで、
ラジアル方向に吐出する作用を営むようになっている。
吐出されたガスは、送風空間S3を流れた後、断熱本体
11に設けたノズル11aを介して熱処理空間S1に配
置した処理物Wに向かって噴出し、このとき断熱蓋1
2、13を開成しておくことによって、冷却空間S2を
介して熱交換器15に還流するようになっている。以
下、この系路をガス循環系路と称する。
The cooling fan 5 is arranged at a position facing the heat exchanger 15 in the gas cooling space S2, and its shaft portion penetrates the container 1 and is connected to a motor 51 outside the furnace. Then, by driving the motor 51, the gas existing in the gas cooling space S2 is sucked in from the core direction,
It is designed to discharge in the radial direction.
The discharged gas, after flowing through the air blowing space S3, is jetted toward the processed material W arranged in the heat treatment space S1 through the nozzle 11a provided in the heat insulating main body 11, and at this time, the heat insulating lid 1
By opening 2 and 13, the heat is returned to the heat exchanger 15 through the cooling space S2. Hereinafter, this system is referred to as a gas circulation system.

【0013】次に、炉内に装入された処理物Wに対して
排気系2によって作られた真空下に加熱手段3を通じて
各種熱処理を施した後、急速冷却に供する様子について
説明する。予め熱処理完了までに、液化窒素ガスボンベ
7のバルブ81を開き、小型サージタンク8を約10kg
f/cm2まで加圧しておく。加熱処理が終わった後、排気
弁23を閉じ、モータ51を起動して冷却ファン5を回
し、当初閉じておいたバルブ41、71を開く。霧化器
6のベンチュリ部61には液化窒素ガスボンベ7内の液
体窒素がガス圧により供給され、その状態でベンチュリ
入口部62に小型サージタンク8から高圧の窒素ガスが
流れ込むため、窒素ガスはその霧化器6のベンチュリ部
61を通過する時、液体窒素を霧化して容器1内に流し
込む。ベンチュリ出口部63は真空である送風空間S3
に直接連通しているのに対して、ベンチュリ入口部62
はサージタンク8に連通しているため、ベンチュリ61
内に音速流が発生し、流し得る最大の流量が得られる。
一方、容器1内のガス冷却空間S2に導入された霧状の
液体窒素は容器1内の熱により気化し、爆発的に膨張し
て、容器1内の圧力を急上昇させる。容器1内のガス圧
はタイマによるバルブ71の開閉又は容器1に付帯して
設けた圧力調節器16の設定を通じて約1〜2秒間で炉
内圧が例えば8kgf/cm2程度となるように液体窒素の量
をコントロールする。そして、その窒素ガスが前述した
ガス循環系路に沿って処理物Wに送風され、その間、熱
交換器15で冷却されて再び処理物Wに送風されるとい
うサイクルを繰り返す。この間、処理物Wは窒素ガスが
直接吹き付けられることによって冷却され、また導入時
に霧状の液体窒素が気化するときの気化熱が各炉材から
気化熱を奪うことによっても間接的に冷却される。
Next, a description will be given of the manner in which the workpiece W charged in the furnace is subjected to various heat treatments under the vacuum created by the exhaust system 2 through the heating means 3 and then subjected to rapid cooling. By the time the heat treatment is completed, the valve 81 of the liquefied nitrogen gas cylinder 7 is opened and the small surge tank 8 is about 10 kg.
Pressurize to f / cm 2 . After the heating process is completed, the exhaust valve 23 is closed, the motor 51 is started, the cooling fan 5 is rotated, and the valves 41 and 71 that were originally closed are opened. Liquid nitrogen in the liquefied nitrogen gas cylinder 7 is supplied to the venturi portion 61 of the atomizer 6 by gas pressure, and high pressure nitrogen gas flows into the venturi inlet portion 62 from the small surge tank 8 in that state, so that the nitrogen gas When passing through the venturi portion 61 of the atomizer 6, the liquid nitrogen is atomized and poured into the container 1. The venturi outlet 63 has a ventilation space S3 that is a vacuum.
While communicating directly with the Venturi inlet section 62
Is connected to the surge tank 8, the venturi 61
A sonic flow is generated inside, and the maximum possible flow rate is obtained.
On the other hand, the atomized liquid nitrogen introduced into the gas cooling space S2 inside the container 1 is vaporized by the heat inside the container 1 and explosively expands, causing the pressure inside the container 1 to rise rapidly. The gas pressure in the container 1 is controlled by opening and closing the valve 71 by a timer or setting the pressure controller 16 attached to the container 1 so that the internal pressure of the furnace becomes about 8 kgf / cm 2 in about 1 to 2 seconds. Control the amount of. Then, the cycle in which the nitrogen gas is blown to the processed material W along the above-described gas circulation system, while being cooled by the heat exchanger 15 and blown to the processed material W again, is repeated. During this time, the processed material W is cooled by directly blowing nitrogen gas, and also indirectly by cooling the vaporization heat when the atomized liquid nitrogen is vaporized at the time of introduction from the respective furnace materials. .

【0014】以上のような冷却機能を備えた熱処理炉で
あると、冷媒である窒素の液化時と気化時との体積比を
利用して、実質的に冷却の大半を司っている液体窒素を
貯溜した液体窒素ガスボンベ7の内容積を、従来のサー
ジタンクに比べて格段に小さくすることができる。つま
り、実質的な冷媒貯溜量が同じである場合には、理論的
な内容積比にして1/666とすることができる。この
実施例では、霧化を促進するために窒素ガスを用いてお
り、その加圧ガスの貯溜用にサージタンク8を備えては
いるが、このサージタンク8は容器1に充填される窒素
ガスの全量を貯溜しておくものではなく、霧化に必要な
量さえあれば足りるため、従来の内容積の数分の一ない
しそれ以下の内容積を付与しておけば十分である。この
ため、液体窒素ガスボンベ7とサージタンク8を併せて
も、従来のサージタンクの内容積に比べて格段に小さい
もので賄うことができる。しかも、液体窒素を高温の容
器1内に霧状で導入することで、導入時の体積を抑えな
がら導入後に冷媒を爆発的に膨張させて瞬時に所要の高
圧ガス雰囲気を作り出すことができるので、小さい配管
であっても極めて高効率のガス導入が行え、従来よりも
短時間で容器1内を所定圧に昇圧することができる(従
来では炉内を同等の所定圧にするのに7秒程度を要して
いた)。その上、比較的脆弱な断熱材11、12、13
などの炉内構成要素に局所的なダメージを与える風圧の
発生も有効に回避することができる。また、気化が炉内
で起こるため、バルブ41の開閉のタイミングを適切に
制御すれば、炉内圧を供給圧以上に上げることも可能で
ある。さらに、容器1内において液体窒素が気化する
際、周囲から気化熱を奪うため、窒素ガスを導入する場
合に比べて、冷却効率をより有効に高めることが可能と
なる。
In the heat treatment furnace having the cooling function as described above, the liquid nitrogen that substantially controls most of the cooling is utilized by utilizing the volume ratio between the liquefaction and the vaporization of the refrigerant nitrogen. It is possible to make the internal volume of the liquid nitrogen gas cylinder 7 in which is stored much smaller than that of the conventional surge tank. That is, when the refrigerant storage amount is substantially the same, the theoretical internal volume ratio can be set to 1/666. In this embodiment, nitrogen gas is used to promote atomization, and a surge tank 8 is provided for storing the pressurized gas, but this surge tank 8 is filled with nitrogen gas. It is not necessary to store the entire amount of the above, and it is sufficient to provide an internal volume that is a fraction of or less than the conventional internal volume, as long as the amount necessary for atomization is sufficient. Therefore, even if the liquid nitrogen gas cylinder 7 and the surge tank 8 are used together, it is possible to cover with a much smaller volume than the conventional surge tank. Moreover, by introducing liquid nitrogen into the high-temperature container 1 in a mist state, it is possible to explosively expand the refrigerant after introduction while suppressing the volume at the time of introduction, and to instantly create the required high-pressure gas atmosphere. Gas can be introduced with extremely high efficiency even with a small pipe, and the pressure inside the container 1 can be raised to a predetermined pressure in a shorter time than before (in the past, it took about 7 seconds to bring the inside of the furnace to the same predetermined pressure). Was needed). In addition, the relatively fragile insulation 11, 12, 13
It is also possible to effectively avoid the generation of wind pressure that locally damages the components inside the furnace such as. Further, since vaporization occurs in the furnace, it is possible to raise the furnace pressure above the supply pressure by appropriately controlling the opening / closing timing of the valve 41. Further, when the liquid nitrogen vaporizes in the container 1, the heat of vaporization is taken from the surroundings, so that the cooling efficiency can be more effectively enhanced as compared with the case of introducing the nitrogen gas.

【0015】以上説明したように、本実施例の熱処理炉
を利用すると、短時間のうちに容器1内を急速冷却に適
した高圧ガス雰囲気にし、同時に気化熱も利用して、焼
き入れ処理等の性能を効果的に高めることができるだけ
でなく、炉の構成もコンパクトなものにすることがで
き、同時に炉材の耐久性も有効に向上させることが可能
となる。
As described above, when the heat treatment furnace of this embodiment is used, the inside of the container 1 is brought into a high-pressure gas atmosphere suitable for rapid cooling within a short time, and at the same time, the heat of vaporization is also used to perform quenching treatment and the like. Not only can the performance of the furnace be effectively improved, but also the structure of the furnace can be made compact, and at the same time, the durability of the furnace material can be effectively improved.

【0016】なお、各部の具体的な構成は、図示実施例
のものに限定されるものではない。例えば、本発明は加
熱室と冷却室を分けた多室型の熱処理炉において当該冷
却室に適用することができるのは勿論である。また、サ
ージタンクは上記実施例では液体窒素ガスボンベの気相
部分からチャージしているが、液体窒素を直接送り込ん
で蒸発させることによりサージタンク内のガス温度が低
く保たれるようにしてもよい。さらにまた、霧化器のベ
ンチュリ部における霧化用ガスが得られる範囲におい
て、サージタンクを用いずに液体窒素ガスボンベのみを
設置してボンベ内の加圧ガスを用いて実施することも可
能である。この構成は、焼結炉を含む一般の熱処理炉の
冷却速度短縮に極めて有効である。
The specific configuration of each section is not limited to the illustrated embodiment. For example, it goes without saying that the present invention can be applied to a cooling chamber in a multi-chamber type heat treatment furnace in which a heating chamber and a cooling chamber are separated. Further, although the surge tank is charged from the gas phase portion of the liquid nitrogen gas cylinder in the above embodiment, the gas temperature in the surge tank may be kept low by directly feeding and evaporating the liquid nitrogen. Further, it is also possible to install only the liquid nitrogen gas cylinder without using the surge tank and use the pressurized gas in the cylinder in the range where the atomizing gas can be obtained in the venturi part of the atomizer. . This configuration is extremely effective in reducing the cooling rate of a general heat treatment furnace including a sintering furnace.

【0017】その他の構成も、本発明の趣旨を逸脱しな
い範囲で種々変形が可能である。
Other configurations can be variously modified without departing from the spirit of the present invention.

【0018】[0018]

【発明の効果】本発明の熱処理炉は、以上説明したよう
な構成であるから、短時間のうちに炉内を急速冷却に適
した高圧ガス雰囲気にし、同時に気化熱も利用して、焼
き入れ処理等の性能を有効に高めることができる。ま
た、炉の構成もコンパクトなものにすることができ、同
時に炉の耐久性も有効に向上させることが可能となる。
Since the heat treatment furnace of the present invention is constructed as described above, the inside of the furnace is brought into a high-pressure gas atmosphere suitable for rapid cooling within a short time, and at the same time, the heat of vaporization is used to quench the heat treatment. It is possible to effectively improve performance such as processing. Further, the structure of the furnace can be made compact, and at the same time, the durability of the furnace can be effectively improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す概略的な縦断面図。FIG. 1 is a schematic vertical sectional view showing an embodiment of the present invention.

【図2】同横断面図。FIG. 2 is a cross-sectional view of the same.

【図3】同実施例の要部を示す図。FIG. 3 is a diagram showing a main part of the embodiment.

【符号の説明】[Explanation of symbols]

W…処理物 1…炉 2…排気系 3…加熱手段 4…冷媒導入系路 5…冷却ファン 6…霧化器(噴霧ノズル) 7…冷媒容器(液体窒素ガスボンベ) W ... Treated material 1 ... Furnace 2 ... Exhaust system 3 ... Heating means 4 ... Refrigerant introduction system path 5 ... Cooling fan 6 ... Atomizer (spray nozzle) 7 ... Refrigerant container (liquid nitrogen gas cylinder)

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】炉内を真空排気する排気系と、炉内に装入
された処理物を加熱する加熱手段と、加熱後の炉内に冷
媒を導入する冷媒導入系路と、導入された冷媒を処理物
に向かって送風する冷却ファンとを具備してなるものに
おいて、 前記冷媒導入系路に霧化器を介して冷媒が液化状態で貯
溜された冷媒容器を断接切替可能に接続してなることを
特徴とする熱処理炉。
1. An exhaust system for evacuating the inside of a furnace, a heating means for heating a processed material charged in the furnace, and a refrigerant introducing system passage for introducing a refrigerant into the furnace after heating. In a device comprising a cooling fan for blowing the refrigerant toward the processed material, a refrigerant container in which the refrigerant is stored in a liquefied state is connected to the refrigerant introduction system passage via an atomizer in a disconnectable and switchable manner. A heat treatment furnace characterized by:
JP8037496A 1996-04-02 1996-04-02 Heat treatment furnace Withdrawn JPH09273864A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8037496A JPH09273864A (en) 1996-04-02 1996-04-02 Heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8037496A JPH09273864A (en) 1996-04-02 1996-04-02 Heat treatment furnace

Publications (1)

Publication Number Publication Date
JPH09273864A true JPH09273864A (en) 1997-10-21

Family

ID=13716513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8037496A Withdrawn JPH09273864A (en) 1996-04-02 1996-04-02 Heat treatment furnace

Country Status (1)

Country Link
JP (1) JPH09273864A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7444823B2 (en) * 2002-01-09 2008-11-04 L'air Liquide, Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Method and device for cooling a stream of gaseous liquid and a method of cooling articles
CN109097530A (en) * 2018-08-20 2018-12-28 益发施迈茨工业炉(上海)有限公司 Vacuumize deep cooling tempering furnace and its deep cooling tempering method for treating
CN111665119A (en) * 2020-07-11 2020-09-15 贝士德仪器科技(北京)有限公司 Chemical adsorption instrument of shell-type heating furnace with automatic opening and closing air cooling structure

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7444823B2 (en) * 2002-01-09 2008-11-04 L'air Liquide, Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Method and device for cooling a stream of gaseous liquid and a method of cooling articles
CN109097530A (en) * 2018-08-20 2018-12-28 益发施迈茨工业炉(上海)有限公司 Vacuumize deep cooling tempering furnace and its deep cooling tempering method for treating
CN109097530B (en) * 2018-08-20 2024-01-30 益发施迈茨工业炉(上海)有限公司 Vacuumizing cryogenic tempering furnace and cryogenic tempering treatment method thereof
CN111665119A (en) * 2020-07-11 2020-09-15 贝士德仪器科技(北京)有限公司 Chemical adsorption instrument of shell-type heating furnace with automatic opening and closing air cooling structure

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