JPS6432106A - Outward appearance inspecting method for substrate - Google Patents
Outward appearance inspecting method for substrateInfo
- Publication number
- JPS6432106A JPS6432106A JP18766287A JP18766287A JPS6432106A JP S6432106 A JPS6432106 A JP S6432106A JP 18766287 A JP18766287 A JP 18766287A JP 18766287 A JP18766287 A JP 18766287A JP S6432106 A JPS6432106 A JP S6432106A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- axial
- abut
- inspected
- wall surfaces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To decided whether or not there is a recessed absent part as well as abnormality of the external diameter of a substrate to be inspected and a projection burr of the outer peripheral edge art by making the substrate to be inspected abut on an L-shaped abutting body and an X-axial and a Y-axial moving terminal and detecting the area of its gap part which do not come into contact from the amount of a medium passing through it. CONSTITUTION:A substrate supporting base 4 is selected matching with the substrate 5 to be inspected and mounted on the substrate 5. Then the X-axial and Y-axial moving terminals 2 and 3 which are formed movably forward and backward in parts partitioned by the X-axial and Y-axial wall surfaces 1a and 1b, guide wall 1e, and auxiliary walls 1c and 1d of the L-shaped abutting body 1 are moved in an X and a Y axis. Thus they are made to abut on adjacent two sides of the substrate 5 and other two adjacent sides are made to abut on the wall surfaces 1a and 1b. Then a vacuum sensor 7 measures negative pressure a constant time after the start of air suction by a vacuum pump. Thus, the state wherein air leaks from the part that the outer periphery of the substrate 5 does not abut on is detected. This detected value is compared with that of a standard substrate to decide whether or not the object substrate is normal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18766287A JPS6432106A (en) | 1987-07-29 | 1987-07-29 | Outward appearance inspecting method for substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18766287A JPS6432106A (en) | 1987-07-29 | 1987-07-29 | Outward appearance inspecting method for substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6432106A true JPS6432106A (en) | 1989-02-02 |
Family
ID=16209984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18766287A Pending JPS6432106A (en) | 1987-07-29 | 1987-07-29 | Outward appearance inspecting method for substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6432106A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6423386B2 (en) | 1998-04-06 | 2002-07-23 | Hitachi Metals, Ltd. | Magnet powder-resin compound particles, method for producing such compound particles and resin-bonded rare earth magnets formed therefrom |
-
1987
- 1987-07-29 JP JP18766287A patent/JPS6432106A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6423386B2 (en) | 1998-04-06 | 2002-07-23 | Hitachi Metals, Ltd. | Magnet powder-resin compound particles, method for producing such compound particles and resin-bonded rare earth magnets formed therefrom |
| USRE40524E1 (en) * | 1998-04-06 | 2008-09-30 | Hitachi Metals, Ltd. | Magnet powder-resin compound particles, method for producing such compound particles and resin-bonded rare earth magnets formed therefrom |
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