JPS6431331A - Field emission type ion source - Google Patents

Field emission type ion source

Info

Publication number
JPS6431331A
JPS6431331A JP62187082A JP18708287A JPS6431331A JP S6431331 A JPS6431331 A JP S6431331A JP 62187082 A JP62187082 A JP 62187082A JP 18708287 A JP18708287 A JP 18708287A JP S6431331 A JPS6431331 A JP S6431331A
Authority
JP
Japan
Prior art keywords
ions
beryllium
silicon
element alloy
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62187082A
Other languages
Japanese (ja)
Other versions
JP2671983B2 (en
Inventor
Akio Mutsukawa
Hirotoshi Hagiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP62187082A priority Critical patent/JP2671983B2/en
Publication of JPS6431331A publication Critical patent/JPS6431331A/en
Application granted granted Critical
Publication of JP2671983B2 publication Critical patent/JP2671983B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To make it possible to emit stably silicon ions and beryllium ions for a long time by specifying composition of a three-element alloy composed of silicon, beryllium and gold. CONSTITUTION:A three-element alloy is liquidized, which is composed of 17-24atom.% of silicon, 7.5-14atom.% of beryllium and the remainder of gold to be carried on surface of a pin-shaped electrode made of tungsten to emit ions in electrical field. When composition of the three-element alloy is specific like this, a radius of curvature of the tip of the pin-shaped electrode remains in a small value even beams are emitted, so electrical field rarely decreases. Accordingly, there is no increase of a pulled-out voltage when constant current ion beams are pulled out for a long time, and silicon ions or beryllium ions are stably emitted.
JP62187082A 1987-07-27 1987-07-27 Field emission type ion source Expired - Fee Related JP2671983B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62187082A JP2671983B2 (en) 1987-07-27 1987-07-27 Field emission type ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62187082A JP2671983B2 (en) 1987-07-27 1987-07-27 Field emission type ion source

Publications (2)

Publication Number Publication Date
JPS6431331A true JPS6431331A (en) 1989-02-01
JP2671983B2 JP2671983B2 (en) 1997-11-05

Family

ID=16199812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62187082A Expired - Fee Related JP2671983B2 (en) 1987-07-27 1987-07-27 Field emission type ion source

Country Status (1)

Country Link
JP (1) JP2671983B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58223699A (en) * 1982-06-21 1983-12-26 Agency Of Ind Science & Technol Device for maskless ion implantation
JPS59189545A (en) * 1983-04-11 1984-10-27 Agency Of Ind Science & Technol Manufacture of liquid metal ion source for field emission type ion beam generator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58223699A (en) * 1982-06-21 1983-12-26 Agency Of Ind Science & Technol Device for maskless ion implantation
JPS59189545A (en) * 1983-04-11 1984-10-27 Agency Of Ind Science & Technol Manufacture of liquid metal ion source for field emission type ion beam generator

Also Published As

Publication number Publication date
JP2671983B2 (en) 1997-11-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees