JPS6430636A - Method and apparatus for producing compound superfine powder - Google Patents

Method and apparatus for producing compound superfine powder

Info

Publication number
JPS6430636A
JPS6430636A JP18542887A JP18542887A JPS6430636A JP S6430636 A JPS6430636 A JP S6430636A JP 18542887 A JP18542887 A JP 18542887A JP 18542887 A JP18542887 A JP 18542887A JP S6430636 A JPS6430636 A JP S6430636A
Authority
JP
Japan
Prior art keywords
gas
evaporated
evaporating
superfine powder
collecting wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18542887A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0475774B2 (cg-RX-API-DMAC7.html
Inventor
Hitoshi Kondo
Hiroaki Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP18542887A priority Critical patent/JPS6430636A/ja
Publication of JPS6430636A publication Critical patent/JPS6430636A/ja
Publication of JPH0475774B2 publication Critical patent/JPH0475774B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
    • B01J12/02—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor for obtaining at least one reaction product which, at normal temperature, is in the solid state

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP18542887A 1987-07-27 1987-07-27 Method and apparatus for producing compound superfine powder Granted JPS6430636A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18542887A JPS6430636A (en) 1987-07-27 1987-07-27 Method and apparatus for producing compound superfine powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18542887A JPS6430636A (en) 1987-07-27 1987-07-27 Method and apparatus for producing compound superfine powder

Publications (2)

Publication Number Publication Date
JPS6430636A true JPS6430636A (en) 1989-02-01
JPH0475774B2 JPH0475774B2 (cg-RX-API-DMAC7.html) 1992-12-01

Family

ID=16170613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18542887A Granted JPS6430636A (en) 1987-07-27 1987-07-27 Method and apparatus for producing compound superfine powder

Country Status (1)

Country Link
JP (1) JPS6430636A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013227612A (ja) * 2012-04-25 2013-11-07 Canon Inc 成膜装置及び成膜方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013227612A (ja) * 2012-04-25 2013-11-07 Canon Inc 成膜装置及び成膜方法

Also Published As

Publication number Publication date
JPH0475774B2 (cg-RX-API-DMAC7.html) 1992-12-01

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