JPS6430471A - Two-dimensional driving device - Google Patents

Two-dimensional driving device

Info

Publication number
JPS6430471A
JPS6430471A JP62185849A JP18584987A JPS6430471A JP S6430471 A JPS6430471 A JP S6430471A JP 62185849 A JP62185849 A JP 62185849A JP 18584987 A JP18584987 A JP 18584987A JP S6430471 A JPS6430471 A JP S6430471A
Authority
JP
Japan
Prior art keywords
driving
time
controlling
controlling circuit
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62185849A
Other languages
Japanese (ja)
Inventor
Atsushi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62185849A priority Critical patent/JPS6430471A/en
Publication of JPS6430471A publication Critical patent/JPS6430471A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods

Abstract

PURPOSE:To improve rectilinear propergation characteristic and responsiveness, by driving all oscillating units in the same phase at the same time. CONSTITUTION:A two-dimensional driving gear is composed of the oscillating units 4-51-53 of driving sources, these driving circuits 4-41-43, a direction controlling circuit 4-3 for controlling the output of said circuits, a drive controlling circuit 4-2, and an arithmetic controlling circuit 4-1 for arithmetic-controlling by input order from a setting means. At the time of driving, the driving force of a specified scale is generated at the respective oscillating units 4-51-53. Accordingly, the sum of respective vectors is set in the direction of driving a movable table as a moving unit. Besides, at the time of stopping, the scales of the vectors in the respective directions are made equal to each other. As a result, a force in the direction of canceling an inertial force is worked, and responsiveness at the time of stopping is improved.
JP62185849A 1987-07-24 1987-07-24 Two-dimensional driving device Pending JPS6430471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62185849A JPS6430471A (en) 1987-07-24 1987-07-24 Two-dimensional driving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62185849A JPS6430471A (en) 1987-07-24 1987-07-24 Two-dimensional driving device

Publications (1)

Publication Number Publication Date
JPS6430471A true JPS6430471A (en) 1989-02-01

Family

ID=16177955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62185849A Pending JPS6430471A (en) 1987-07-24 1987-07-24 Two-dimensional driving device

Country Status (1)

Country Link
JP (1) JPS6430471A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009225503A (en) * 2008-03-13 2009-10-01 Canon Inc Drive unit of multiple degrees of freedom
JP2013009596A (en) * 2012-10-09 2013-01-10 Canon Inc Multi-freedom driving device
JP2014067016A (en) * 2012-09-10 2014-04-17 Canon Inc Control device, actuator including control device, image shake correction device, replacement lens, imaging device, and automatic stage

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009225503A (en) * 2008-03-13 2009-10-01 Canon Inc Drive unit of multiple degrees of freedom
JP2014067016A (en) * 2012-09-10 2014-04-17 Canon Inc Control device, actuator including control device, image shake correction device, replacement lens, imaging device, and automatic stage
JP2013009596A (en) * 2012-10-09 2013-01-10 Canon Inc Multi-freedom driving device

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