JPS6430215A - Cantilever paddle - Google Patents
Cantilever paddleInfo
- Publication number
- JPS6430215A JPS6430215A JP18557287A JP18557287A JPS6430215A JP S6430215 A JPS6430215 A JP S6430215A JP 18557287 A JP18557287 A JP 18557287A JP 18557287 A JP18557287 A JP 18557287A JP S6430215 A JPS6430215 A JP S6430215A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- furnace
- specified set
- semiconductor wafers
- cantilever paddle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To keep the in-furnace temperature at specified set up temperature for stabilizing the heat treatment and equalizing the film thickness etc. CONSTITUTION:A wafer boat 5 containing multiple semiconductor wafers 6 erected on the boat 5 at specified intervals is loaded on a cantilever paddle 3 inserted into a furnace cylinder 1 heated by a heater 2 to be heat treated at specified set up temperature. In this case, the internal temperature of the furnace cylinder 1 is varied corresponding to the numbers of the semiconductor wafers 6 so that thermocouples 4 to measure the changeable in-furnace temperatures within the measurable range from 50 deg.C to 1300 deg.C may be buried in the cantilever paddle 3 thus measuring the in-furnace temperatures to control the heater 2 for keeping them at specified set up temperature. Through these procedures, the in-furnace temperature can be kept at specified set up temperature to enhance the reliability on the heat treatment of semiconductor wafers.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18557287A JPS6430215A (en) | 1987-07-27 | 1987-07-27 | Cantilever paddle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18557287A JPS6430215A (en) | 1987-07-27 | 1987-07-27 | Cantilever paddle |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6430215A true JPS6430215A (en) | 1989-02-01 |
Family
ID=16173154
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18557287A Pending JPS6430215A (en) | 1987-07-27 | 1987-07-27 | Cantilever paddle |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6430215A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5603772A (en) * | 1994-08-16 | 1997-02-18 | Nec Corporation | Furnace equipped with independently controllable heater elements for uniformly heating semiconductor wafers |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5568582A (en) * | 1978-11-17 | 1980-05-23 | Kokusai Electric Co Ltd | Method of controlling temperature distribution in diffusion furnace |
JPS6212123A (en) * | 1985-07-09 | 1987-01-21 | Nec Kyushu Ltd | Lever for soft landing |
-
1987
- 1987-07-27 JP JP18557287A patent/JPS6430215A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5568582A (en) * | 1978-11-17 | 1980-05-23 | Kokusai Electric Co Ltd | Method of controlling temperature distribution in diffusion furnace |
JPS6212123A (en) * | 1985-07-09 | 1987-01-21 | Nec Kyushu Ltd | Lever for soft landing |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5603772A (en) * | 1994-08-16 | 1997-02-18 | Nec Corporation | Furnace equipped with independently controllable heater elements for uniformly heating semiconductor wafers |
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