JPS6430215A - Cantilever paddle - Google Patents

Cantilever paddle

Info

Publication number
JPS6430215A
JPS6430215A JP18557287A JP18557287A JPS6430215A JP S6430215 A JPS6430215 A JP S6430215A JP 18557287 A JP18557287 A JP 18557287A JP 18557287 A JP18557287 A JP 18557287A JP S6430215 A JPS6430215 A JP S6430215A
Authority
JP
Japan
Prior art keywords
temperature
furnace
specified set
semiconductor wafers
cantilever paddle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18557287A
Other languages
Japanese (ja)
Inventor
Yuuji Toshiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP18557287A priority Critical patent/JPS6430215A/en
Publication of JPS6430215A publication Critical patent/JPS6430215A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To keep the in-furnace temperature at specified set up temperature for stabilizing the heat treatment and equalizing the film thickness etc. CONSTITUTION:A wafer boat 5 containing multiple semiconductor wafers 6 erected on the boat 5 at specified intervals is loaded on a cantilever paddle 3 inserted into a furnace cylinder 1 heated by a heater 2 to be heat treated at specified set up temperature. In this case, the internal temperature of the furnace cylinder 1 is varied corresponding to the numbers of the semiconductor wafers 6 so that thermocouples 4 to measure the changeable in-furnace temperatures within the measurable range from 50 deg.C to 1300 deg.C may be buried in the cantilever paddle 3 thus measuring the in-furnace temperatures to control the heater 2 for keeping them at specified set up temperature. Through these procedures, the in-furnace temperature can be kept at specified set up temperature to enhance the reliability on the heat treatment of semiconductor wafers.
JP18557287A 1987-07-27 1987-07-27 Cantilever paddle Pending JPS6430215A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18557287A JPS6430215A (en) 1987-07-27 1987-07-27 Cantilever paddle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18557287A JPS6430215A (en) 1987-07-27 1987-07-27 Cantilever paddle

Publications (1)

Publication Number Publication Date
JPS6430215A true JPS6430215A (en) 1989-02-01

Family

ID=16173154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18557287A Pending JPS6430215A (en) 1987-07-27 1987-07-27 Cantilever paddle

Country Status (1)

Country Link
JP (1) JPS6430215A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5603772A (en) * 1994-08-16 1997-02-18 Nec Corporation Furnace equipped with independently controllable heater elements for uniformly heating semiconductor wafers

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568582A (en) * 1978-11-17 1980-05-23 Kokusai Electric Co Ltd Method of controlling temperature distribution in diffusion furnace
JPS6212123A (en) * 1985-07-09 1987-01-21 Nec Kyushu Ltd Lever for soft landing

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5568582A (en) * 1978-11-17 1980-05-23 Kokusai Electric Co Ltd Method of controlling temperature distribution in diffusion furnace
JPS6212123A (en) * 1985-07-09 1987-01-21 Nec Kyushu Ltd Lever for soft landing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5603772A (en) * 1994-08-16 1997-02-18 Nec Corporation Furnace equipped with independently controllable heater elements for uniformly heating semiconductor wafers

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