JPS6429290U - - Google Patents

Info

Publication number
JPS6429290U
JPS6429290U JP12397487U JP12397487U JPS6429290U JP S6429290 U JPS6429290 U JP S6429290U JP 12397487 U JP12397487 U JP 12397487U JP 12397487 U JP12397487 U JP 12397487U JP S6429290 U JPS6429290 U JP S6429290U
Authority
JP
Japan
Prior art keywords
room
housing
turbo
molecular pump
evacuated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12397487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0732956Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987123974U priority Critical patent/JPH0732956Y2/ja
Publication of JPS6429290U publication Critical patent/JPS6429290U/ja
Application granted granted Critical
Publication of JPH0732956Y2 publication Critical patent/JPH0732956Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1987123974U 1987-08-13 1987-08-13 タ−ボ分子ポンプ Expired - Lifetime JPH0732956Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987123974U JPH0732956Y2 (ja) 1987-08-13 1987-08-13 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987123974U JPH0732956Y2 (ja) 1987-08-13 1987-08-13 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6429290U true JPS6429290U (US20080094685A1-20080424-C00004.png) 1989-02-21
JPH0732956Y2 JPH0732956Y2 (ja) 1995-07-31

Family

ID=31373310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987123974U Expired - Lifetime JPH0732956Y2 (ja) 1987-08-13 1987-08-13 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH0732956Y2 (US20080094685A1-20080424-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5676453B2 (ja) * 2009-08-26 2015-02-25 株式会社島津製作所 ターボ分子ポンプおよびロータの製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4671624B2 (ja) * 2004-05-25 2011-04-20 エドワーズ株式会社 真空ポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584323A (ja) * 1981-06-26 1983-01-11 Osaka Shinku Kiki Seisakusho:Kk 動翼付ロ−タ−の成形法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584323A (ja) * 1981-06-26 1983-01-11 Osaka Shinku Kiki Seisakusho:Kk 動翼付ロ−タ−の成形法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5676453B2 (ja) * 2009-08-26 2015-02-25 株式会社島津製作所 ターボ分子ポンプおよびロータの製造方法
US10024327B2 (en) 2009-08-26 2018-07-17 Shimadzu Corporation Turbomolecular pump, and method of manufacturing rotor

Also Published As

Publication number Publication date
JPH0732956Y2 (ja) 1995-07-31

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