JPS6429289U - - Google Patents

Info

Publication number
JPS6429289U
JPS6429289U JP1987123099U JP12309987U JPS6429289U JP S6429289 U JPS6429289 U JP S6429289U JP 1987123099 U JP1987123099 U JP 1987123099U JP 12309987 U JP12309987 U JP 12309987U JP S6429289 U JPS6429289 U JP S6429289U
Authority
JP
Japan
Prior art keywords
rotor
annular permanent
holding cylinder
attached
permanent magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987123099U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0749039Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987123099U priority Critical patent/JPH0749039Y2/ja
Publication of JPS6429289U publication Critical patent/JPS6429289U/ja
Application granted granted Critical
Publication of JPH0749039Y2 publication Critical patent/JPH0749039Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP1987123099U 1987-08-13 1987-08-13 ターボ分子ポンプ Expired - Lifetime JPH0749039Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987123099U JPH0749039Y2 (ja) 1987-08-13 1987-08-13 ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987123099U JPH0749039Y2 (ja) 1987-08-13 1987-08-13 ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6429289U true JPS6429289U (US20090177143A1-20090709-C00008.png) 1989-02-21
JPH0749039Y2 JPH0749039Y2 (ja) 1995-11-13

Family

ID=31371639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987123099U Expired - Lifetime JPH0749039Y2 (ja) 1987-08-13 1987-08-13 ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH0749039Y2 (US20090177143A1-20090709-C00008.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020145150A1 (ja) * 2019-01-10 2020-07-16 エドワーズ株式会社 真空ポンプ
JPWO2020240621A1 (US20090177143A1-20090709-C00008.png) * 2019-05-24 2020-12-03

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020145150A1 (ja) * 2019-01-10 2020-07-16 エドワーズ株式会社 真空ポンプ
JPWO2020240621A1 (US20090177143A1-20090709-C00008.png) * 2019-05-24 2020-12-03
WO2020240621A1 (ja) * 2019-05-24 2020-12-03 株式会社島津製作所 真空ポンプおよび磁気軸受一体型モータ

Also Published As

Publication number Publication date
JPH0749039Y2 (ja) 1995-11-13

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