JPS642881B2 - - Google Patents
Info
- Publication number
- JPS642881B2 JPS642881B2 JP10297082A JP10297082A JPS642881B2 JP S642881 B2 JPS642881 B2 JP S642881B2 JP 10297082 A JP10297082 A JP 10297082A JP 10297082 A JP10297082 A JP 10297082A JP S642881 B2 JPS642881 B2 JP S642881B2
- Authority
- JP
- Japan
- Prior art keywords
- zoom
- zoom lens
- grating
- zoom lenses
- focus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000012876 topography Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 3
- 239000011295 pitch Substances 0.000 description 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
Landscapes
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10297082A JPS58221103A (ja) | 1982-06-17 | 1982-06-17 | モアレトポグラフイ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10297082A JPS58221103A (ja) | 1982-06-17 | 1982-06-17 | モアレトポグラフイ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58221103A JPS58221103A (ja) | 1983-12-22 |
JPS642881B2 true JPS642881B2 (enrdf_load_stackoverflow) | 1989-01-19 |
Family
ID=14341618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10297082A Granted JPS58221103A (ja) | 1982-06-17 | 1982-06-17 | モアレトポグラフイ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58221103A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100392082B1 (ko) * | 2000-07-08 | 2003-07-22 | 정하철 | 모아레 무늬 촬상장치 |
JP3494964B2 (ja) * | 2000-07-28 | 2004-02-09 | 株式会社山武 | 表面形状測定装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55131709A (en) * | 1979-03-31 | 1980-10-13 | Sumitomo Electric Ind Ltd | Moire fringe measuring device |
-
1982
- 1982-06-17 JP JP10297082A patent/JPS58221103A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58221103A (ja) | 1983-12-22 |
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