JPS6428512A - Surface defect detecting device - Google Patents

Surface defect detecting device

Info

Publication number
JPS6428512A
JPS6428512A JP18225487A JP18225487A JPS6428512A JP S6428512 A JPS6428512 A JP S6428512A JP 18225487 A JP18225487 A JP 18225487A JP 18225487 A JP18225487 A JP 18225487A JP S6428512 A JPS6428512 A JP S6428512A
Authority
JP
Japan
Prior art keywords
projecting
condensing lens
scanner
lens
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18225487A
Other languages
Japanese (ja)
Other versions
JPH0749941B2 (en
Inventor
Hitoshi Tanaka
Yoko Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP18225487A priority Critical patent/JPH0749941B2/en
Publication of JPS6428512A publication Critical patent/JPS6428512A/en
Publication of JPH0749941B2 publication Critical patent/JPH0749941B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To positively detect surface defects of an object through detection of only the scattered light reflected from the surface, by placing a laser scanner on a focus of a projecting and condensing lens and a light detector behind the laser scanner, with controlling the opening degree of the projecting and condensing lens. CONSTITUTION:A laser beam scanner 23 is placed at a position of a focus of a projecting and condensing lens 24, and at the same time a light detector 26 is placed behind the scanner 23. The opening degree of the projecting and condensing lens 24 is arranged to be controllable. In the positional arrangement as above, the laser beam is incident upon an object 20 to be detected with right angles thereto. The regular reflection of the laser beam is then returned along the same route as the incident light to the opening of the projecting and condensing lens 24. However, when the opening degree of the lens 24 is controlled, the regular reflection is not collected. Thus, according to the above-described construction, the scattered light reflected from the defects on the surface of the object 20 is collected by the lens 24 and received by the light detector 26, and processed by a control unit 27, whereby an abnormality of the object 20 is detected. Therefore, not only a foreign substance, but a surface defect or flaw on the surface of the object 20 can be positively detected.
JP18225487A 1987-07-23 1987-07-23 Surface inspection device Expired - Lifetime JPH0749941B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18225487A JPH0749941B2 (en) 1987-07-23 1987-07-23 Surface inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18225487A JPH0749941B2 (en) 1987-07-23 1987-07-23 Surface inspection device

Publications (2)

Publication Number Publication Date
JPS6428512A true JPS6428512A (en) 1989-01-31
JPH0749941B2 JPH0749941B2 (en) 1995-05-31

Family

ID=16115041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18225487A Expired - Lifetime JPH0749941B2 (en) 1987-07-23 1987-07-23 Surface inspection device

Country Status (1)

Country Link
JP (1) JPH0749941B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1850119A1 (en) * 2006-04-26 2007-10-31 Siemens Aktiengesellschaft Optical sensor and method for optical inspection of surfaces
CN111426689A (en) * 2019-01-10 2020-07-17 武汉光谷航天三江激光产业技术研究院有限公司 Line laser chromatography detecting system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1850119A1 (en) * 2006-04-26 2007-10-31 Siemens Aktiengesellschaft Optical sensor and method for optical inspection of surfaces
JP2007292770A (en) * 2006-04-26 2007-11-08 Siemens Ag Optical sensor for detecting point shaped, linear shaped or laminar defects at plane surface area
CN111426689A (en) * 2019-01-10 2020-07-17 武汉光谷航天三江激光产业技术研究院有限公司 Line laser chromatography detecting system

Also Published As

Publication number Publication date
JPH0749941B2 (en) 1995-05-31

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