JPS6428510A - Micro gap measuring device - Google Patents

Micro gap measuring device

Info

Publication number
JPS6428510A
JPS6428510A JP18407387A JP18407387A JPS6428510A JP S6428510 A JPS6428510 A JP S6428510A JP 18407387 A JP18407387 A JP 18407387A JP 18407387 A JP18407387 A JP 18407387A JP S6428510 A JPS6428510 A JP S6428510A
Authority
JP
Japan
Prior art keywords
micro gap
color difference
white board
light source
interference fringes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18407387A
Other languages
Japanese (ja)
Inventor
Sanehiro Joko
Hidetake Mishima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP18407387A priority Critical patent/JPS6428510A/en
Publication of JPS6428510A publication Critical patent/JPS6428510A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To measure a micro gap promptly with high accuracy, by illuminating both the micro gap and a standard white board by the same light source so as to measure the color difference between interference fringes of the micro gap and the white board by a color difference meter, and matching the data of the color difference with stored teaching data. CONSTITUTION:After floating slider 3 is positioned, when a glass disc 5 which is a simulation of a magnetic disc is rotated, a micro gap is formed. Then, when the micro gap is illuminated by a stabilizing light, interference fringes are formed which are in turn magnified by a microscope 6 to be sent to a color difference meter 8. Meanwhile, a standard white board 11 is illuminated by the same light source as the above-described micro gap, and taken into the color difference meter 8 via a microscope 9. Consequently, the color difference between the interference fringes of the micro gap and the light of the standard white board 11 is measured. This data of the color difference is matched with the teaching data stored in a color scale by the use of a computer 14, so that the micro gap can be automatically measured. Accordingly, the micro gap can be measured promptly with high accuracy, without moving or changing the light source.
JP18407387A 1987-07-23 1987-07-23 Micro gap measuring device Pending JPS6428510A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18407387A JPS6428510A (en) 1987-07-23 1987-07-23 Micro gap measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18407387A JPS6428510A (en) 1987-07-23 1987-07-23 Micro gap measuring device

Publications (1)

Publication Number Publication Date
JPS6428510A true JPS6428510A (en) 1989-01-31

Family

ID=16146907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18407387A Pending JPS6428510A (en) 1987-07-23 1987-07-23 Micro gap measuring device

Country Status (1)

Country Link
JP (1) JPS6428510A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8184303B2 (en) 2007-02-20 2012-05-22 Mitsubishi Heavy Industries, Ltd. Film-thickness measurement method and apparatus therefor, and thin-film device fabrication system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8184303B2 (en) 2007-02-20 2012-05-22 Mitsubishi Heavy Industries, Ltd. Film-thickness measurement method and apparatus therefor, and thin-film device fabrication system

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