JPS6428297A - Vapor phase synthesis of diamond - Google Patents

Vapor phase synthesis of diamond

Info

Publication number
JPS6428297A
JPS6428297A JP62250598A JP25059887A JPS6428297A JP S6428297 A JPS6428297 A JP S6428297A JP 62250598 A JP62250598 A JP 62250598A JP 25059887 A JP25059887 A JP 25059887A JP S6428297 A JPS6428297 A JP S6428297A
Authority
JP
Japan
Prior art keywords
nozzle
substrate
hot plasma
electrodes
chemical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62250598A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449517B2 (enrdf_load_stackoverflow
Inventor
Kenichi Sasaki
Kazuaki Kurihara
Motonobu Kawarada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62250598A priority Critical patent/JPS6428297A/ja
Priority to EP88302836A priority patent/EP0286306B1/en
Priority to DE88302836T priority patent/DE3884653T2/de
Priority to SU884355493A priority patent/RU2032765C1/ru
Priority to KR1019880003737A priority patent/KR910006784B1/ko
Priority to US07/177,504 priority patent/US5368897A/en
Publication of JPS6428297A publication Critical patent/JPS6428297A/ja
Priority to US07/905,226 priority patent/US5403399A/en
Publication of JPH0449517B2 publication Critical patent/JPH0449517B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP62250598A 1987-04-03 1987-10-06 Vapor phase synthesis of diamond Granted JPS6428297A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP62250598A JPS6428297A (en) 1987-04-03 1987-10-06 Vapor phase synthesis of diamond
EP88302836A EP0286306B1 (en) 1987-04-03 1988-03-30 Method and apparatus for vapor deposition of diamond
DE88302836T DE3884653T2 (de) 1987-04-03 1988-03-30 Verfahren und Vorrichtung zur Gasphasenabscheidung von Diamant.
SU884355493A RU2032765C1 (ru) 1987-04-03 1988-04-01 Способ нанесения алмазного покрытия из паровой фазы и устройство для его осуществления
KR1019880003737A KR910006784B1 (ko) 1987-04-03 1988-04-02 다이어몬드 증착장치와 방법
US07/177,504 US5368897A (en) 1987-04-03 1988-04-04 Method for arc discharge plasma vapor deposition of diamond
US07/905,226 US5403399A (en) 1987-04-03 1992-06-29 Method and apparatus for vapor deposition of diamond

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8331887 1987-04-03
JP62250598A JPS6428297A (en) 1987-04-03 1987-10-06 Vapor phase synthesis of diamond

Publications (2)

Publication Number Publication Date
JPS6428297A true JPS6428297A (en) 1989-01-30
JPH0449517B2 JPH0449517B2 (enrdf_load_stackoverflow) 1992-08-11

Family

ID=26424366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62250598A Granted JPS6428297A (en) 1987-04-03 1987-10-06 Vapor phase synthesis of diamond

Country Status (1)

Country Link
JP (1) JPS6428297A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196583A (ja) * 1989-01-26 1990-08-03 Nec Home Electron Ltd Ｍｕｓｅ映像信号の表示装置
JP2006509907A (ja) * 2002-12-12 2006-03-23 オーテーベー、グループ、ベスローテン、フェンノートシャップ 基板を処理する方法および装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196583A (ja) * 1989-01-26 1990-08-03 Nec Home Electron Ltd Ｍｕｓｅ映像信号の表示装置
JP2006509907A (ja) * 2002-12-12 2006-03-23 オーテーベー、グループ、ベスローテン、フェンノートシャップ 基板を処理する方法および装置

Also Published As

Publication number Publication date
JPH0449517B2 (enrdf_load_stackoverflow) 1992-08-11

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