JPS6426363U - - Google Patents
Info
- Publication number
- JPS6426363U JPS6426363U JP11971287U JP11971287U JPS6426363U JP S6426363 U JPS6426363 U JP S6426363U JP 11971287 U JP11971287 U JP 11971287U JP 11971287 U JP11971287 U JP 11971287U JP S6426363 U JPS6426363 U JP S6426363U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- gas
- reactive
- gas flow
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005546 reactive sputtering Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 9
- 239000011261 inert gas Substances 0.000 claims 5
- 238000004544 sputter deposition Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11971287U JPS6426363U (enExample) | 1987-08-04 | 1987-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11971287U JPS6426363U (enExample) | 1987-08-04 | 1987-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426363U true JPS6426363U (enExample) | 1989-02-14 |
Family
ID=31365181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11971287U Pending JPS6426363U (enExample) | 1987-08-04 | 1987-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426363U (enExample) |
-
1987
- 1987-08-04 JP JP11971287U patent/JPS6426363U/ja active Pending
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