JPH0422035U - - Google Patents
Info
- Publication number
- JPH0422035U JPH0422035U JP6483990U JP6483990U JPH0422035U JP H0422035 U JPH0422035 U JP H0422035U JP 6483990 U JP6483990 U JP 6483990U JP 6483990 U JP6483990 U JP 6483990U JP H0422035 U JPH0422035 U JP H0422035U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- slow
- circuit
- exhaust circuit
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6483990U JPH0422035U (enExample) | 1990-06-18 | 1990-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6483990U JPH0422035U (enExample) | 1990-06-18 | 1990-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0422035U true JPH0422035U (enExample) | 1992-02-24 |
Family
ID=31596137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6483990U Pending JPH0422035U (enExample) | 1990-06-18 | 1990-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0422035U (enExample) |
-
1990
- 1990-06-18 JP JP6483990U patent/JPH0422035U/ja active Pending