JPS6444631U - - Google Patents
Info
- Publication number
- JPS6444631U JPS6444631U JP1987137994U JP13799487U JPS6444631U JP S6444631 U JPS6444631 U JP S6444631U JP 1987137994 U JP1987137994 U JP 1987137994U JP 13799487 U JP13799487 U JP 13799487U JP S6444631 U JPS6444631 U JP S6444631U
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- gas
- pressure sensor
- reaction chamber
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987137994U JPS6444631U (enExample) | 1987-09-09 | 1987-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987137994U JPS6444631U (enExample) | 1987-09-09 | 1987-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6444631U true JPS6444631U (enExample) | 1989-03-16 |
Family
ID=31399927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987137994U Pending JPS6444631U (enExample) | 1987-09-09 | 1987-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6444631U (enExample) |
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1987
- 1987-09-09 JP JP1987137994U patent/JPS6444631U/ja active Pending