JPS642593U - - Google Patents
Info
- Publication number
- JPS642593U JPS642593U JP9615287U JP9615287U JPS642593U JP S642593 U JPS642593 U JP S642593U JP 9615287 U JP9615287 U JP 9615287U JP 9615287 U JP9615287 U JP 9615287U JP S642593 U JPS642593 U JP S642593U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- holding device
- electrostatic holding
- resistor
- supply circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 claims description 3
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Description
第１，２図はこの考案による静電保持装置の安
全装置の実施例を示し、第１図は平面図、第２図
は断面図である。
図において、２は静電保持装置、４は絶縁基層
、６，８は電極、１０は吸着層、１２は電源回路
、１２ａは＋極、１２ｂは−極、１４は被吸着物
、１６は操作者、１８は鋭利な部材、２０は抵抗
器、ρ１は吸着層１０の電気抵抗率、ρ２は抵抗
器２０の電気抵抗率である。
1 and 2 show an embodiment of the electrostatic holding device safety device according to this invention, with FIG. 1 being a plan view and FIG. 2 being a sectional view. In the figure, 2 is an electrostatic holding device, 4 is an insulating base layer, 6 and 8 are electrodes, 10 is an adsorption layer, 12 is a power supply circuit, 12a is a + pole, 12b is a – pole, 14 is an object to be attracted, and 16 is an operation 18 is a sharp member, 20 is a resistor, ρ1 is the electrical resistivity of the adsorption layer 10, and ρ2 is the electrical resistivity of the resistor 20.
Claims (1)
けた静電保持装置において、前記電極に電源を供
給する電源回路と前記電極との間に抵抗器を直列
に介設したことを特徴とする静電保持装置の安全
装置。 An electrostatic holding device in which an insulating base layer, an electrode, and an adsorption layer are sequentially laminated, characterized in that a resistor is interposed in series between a power supply circuit that supplies power to the electrode and the electrode. Safety device for electrostatic holding device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987096152U JPH0436235Y2 (en) | 1987-06-23 | 1987-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987096152U JPH0436235Y2 (en) | 1987-06-23 | 1987-06-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS642593U true JPS642593U (en) | 1989-01-09 |
| JPH0436235Y2 JPH0436235Y2 (en) | 1992-08-26 |
Family
ID=31320982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987096152U Expired JPH0436235Y2 (en) | 1987-06-23 | 1987-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436235Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5389339U (en) * | 1976-12-23 | 1978-07-21 |
-
1987
- 1987-06-23 JP JP1987096152U patent/JPH0436235Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5389339U (en) * | 1976-12-23 | 1978-07-21 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0436235Y2 (en) | 1992-08-26 |