JPS6411542U - - Google Patents
Info
- Publication number
- JPS6411542U JPS6411542U JP10498387U JP10498387U JPS6411542U JP S6411542 U JPS6411542 U JP S6411542U JP 10498387 U JP10498387 U JP 10498387U JP 10498387 U JP10498387 U JP 10498387U JP S6411542 U JPS6411542 U JP S6411542U
- Authority
- JP
- Japan
- Prior art keywords
- attracted
- conductor
- insulating film
- electrostatic chuck
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 3
- 238000005507 spraying Methods 0.000 claims 1
- 230000005684 electric field Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Description
第１図は本考案に係る静電チヤツクの構造を示
す概略縦断面図、第２図は本考案に係る静電チヤ
ツクを用いて、静電吸着処理時の電界強度と誘起
される静電力との関係を示すグラフ、第３図は従
来の埋設型静電チヤツクの構造を示す概略縦断面
図、第４図は同じく従来の被覆型静電チヤツクの
構造を示す概略縦断面図である。
１…電極、２…セラミツク溶射膜、３…端子。
Fig. 1 is a schematic vertical cross-sectional view showing the structure of the electrostatic chuck according to the present invention, and Fig. 2 shows the relationship between electric field strength and induced electrostatic force during electrostatic adsorption processing using the electrostatic chuck according to the present invention. FIG. 3 is a schematic vertical cross-sectional view showing the structure of a conventional buried type electrostatic chuck, and FIG. 4 is a schematic vertical cross-sectional view showing the structure of a conventional covered electrostatic chuck. 1... Electrode, 2... Ceramic sprayed film, 3... Terminal.
Claims (1)
電体との間に直流電圧を印加し、前記絶縁膜上に
被吸着物を吸着すべくなした静電チヤツクにおい
て、セラミツク溶射にて前記導電体を被覆する絶
縁膜を具備することを特徴とする静電チヤツク。 In an electrostatic chuck in which an insulating film is coated on a conductor, a DC voltage is applied between an object to be attracted and the conductor, and the object to be attracted is attracted to the insulating film, ceramic spraying is used. An electrostatic chuck comprising an insulating film covering the conductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987104983U JPH0636583Y2 (en) | 1987-07-07 | 1987-07-07 | Electrostatic chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987104983U JPH0636583Y2 (en) | 1987-07-07 | 1987-07-07 | Electrostatic chuck |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6411542U true JPS6411542U (en) | 1989-01-20 |
| JPH0636583Y2 JPH0636583Y2 (en) | 1994-09-21 |
Family
ID=31337190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987104983U Expired - Lifetime JPH0636583Y2 (en) | 1987-07-07 | 1987-07-07 | Electrostatic chuck |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636583Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04304942A (en) * | 1991-03-29 | 1992-10-28 | Shin Etsu Chem Co Ltd | Electrostatic chuck substrate and electrostatic chuck |
| JP2010272730A (en) * | 2009-05-22 | 2010-12-02 | Shinko Electric Ind Co Ltd | Electrostatic chuck |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115210860A (en) * | 2021-02-04 | 2022-10-18 | 日本碍子株式会社 | Member for semiconductor manufacturing apparatus and method for manufacturing the same |
| WO2022168368A1 (en) * | 2021-02-04 | 2022-08-11 | 日本碍子株式会社 | Semiconductor manufacturing device member and method for manufacturing same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62286247A (en) * | 1986-06-05 | 1987-12-12 | Toto Ltd | Electrostatic chuck plate and manufacture thereof |
-
1987
- 1987-07-07 JP JP1987104983U patent/JPH0636583Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62286247A (en) * | 1986-06-05 | 1987-12-12 | Toto Ltd | Electrostatic chuck plate and manufacture thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04304942A (en) * | 1991-03-29 | 1992-10-28 | Shin Etsu Chem Co Ltd | Electrostatic chuck substrate and electrostatic chuck |
| JP2010272730A (en) * | 2009-05-22 | 2010-12-02 | Shinko Electric Ind Co Ltd | Electrostatic chuck |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0636583Y2 (en) | 1994-09-21 |