JPH01123495U - - Google Patents
Info
- Publication number
- JPH01123495U JPH01123495U JP1765788U JP1765788U JPH01123495U JP H01123495 U JPH01123495 U JP H01123495U JP 1765788 U JP1765788 U JP 1765788U JP 1765788 U JP1765788 U JP 1765788U JP H01123495 U JPH01123495 U JP H01123495U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- chuck
- dielectric layer
- insulator
- high resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 2
- 239000003973 paint Substances 0.000 claims description 2
- 239000003463 adsorbent Substances 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Description
第１図は本考案の一実施例による静電チヤツク
の断面構成図、第２図は本考案の他の実施例によ
る静電チヤツクの断面構成図である。
１……絶縁物、２ａ，２ｂ……電極、３ａ，３
ｂ……電極のリード線、４，４ａ，４ｂ……誘電
体層（高抵抗を有する超耐熱塗料）、５……基板
。
FIG. 1 is a sectional view of an electrostatic chuck according to one embodiment of the present invention, and FIG. 2 is a sectional view of an electrostatic chuck according to another embodiment of the present invention. 1... Insulator, 2a, 2b... Electrode, 3a, 3
b... Electrode lead wire, 4, 4a, 4b... Dielectric layer (super heat-resistant paint with high resistance), 5... Substrate.
Claims (1)
抵抗を有する超耐熱塗料を塗布して形成された誘
電体層とを備え、前記電極と前記誘電体層上に載
置される吸着物との間に直流電圧を印加して前記
吸着物を吸着するようにしたことを特徴とする静
電チヤツク。 An adsorbent comprising an electrode provided on an insulator and a dielectric layer formed by applying a super heat-resistant paint having high resistance on the electrode, and placed on the electrode and the dielectric layer. An electrostatic chuck characterized in that a DC voltage is applied between the chuck and the chuck to attract the attractable object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1765788U JPH01123495U (en) | 1988-02-12 | 1988-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1765788U JPH01123495U (en) | 1988-02-12 | 1988-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01123495U true JPH01123495U (en) | 1989-08-22 |
Family
ID=31231634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1765788U Pending JPH01123495U (en) | 1988-02-12 | 1988-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01123495U (en) |
-
1988
- 1988-02-12 JP JP1765788U patent/JPH01123495U/ja active Pending