JPH0257294U - - Google Patents
Info
- Publication number
- JPH0257294U JPH0257294U JP13548988U JP13548988U JPH0257294U JP H0257294 U JPH0257294 U JP H0257294U JP 13548988 U JP13548988 U JP 13548988U JP 13548988 U JP13548988 U JP 13548988U JP H0257294 U JPH0257294 U JP H0257294U
- Authority
- JP
- Japan
- Prior art keywords
- comb
- pair
- outer edge
- shaped electrodes
- thermoplastic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920001169 thermoplastic Polymers 0.000 claims description 4
- 239000004416 thermosoftening plastic Substances 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 claims 3
- 239000004020 conductor Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Description
第１図は、従来の静電吸着板の電極構造を示す
平面図、第２図は、本考案の実施例による電極構
造を組み込んだ静電吸着板を示す斜視図である。
１，２…電極、３…熱可塑性絶縁支持層、４…
熱可塑性表面層、１０…外部接続端子、１１…支
持部、１２，１３…端子本体。
FIG. 1 is a plan view showing an electrode structure of a conventional electrostatic chuck plate, and FIG. 2 is a perspective view showing an electrostatic chuck plate incorporating an electrode structure according to an embodiment of the present invention. 1, 2... Electrode, 3... Thermoplastic insulating support layer, 4...
Thermoplastic surface layer, 10... External connection terminal, 11... Support part, 12, 13... Terminal body.
Claims (1)
に噛み合うように熱可塑性絶縁支持層上に配置さ
れ、その上を熱可塑性吸着層が被覆している静電
吸着板において、前記支持層の外縁の一部を、前
記吸着層の外縁より突出させて延長部を形成し、
この延長部上に、前記一対の櫛歯状電極を延ばし
、この部分を外部接続端子としたことを特徴とす
る静電吸着板の電極構造。 In an electrostatic adsorption plate in which a pair of comb-shaped electrodes made of a conductive material are disposed on a thermoplastic insulating support layer so as to mesh with each other, and a thermoplastic adsorption layer is coated thereon, the support layer is a part of the outer edge protrudes from the outer edge of the adsorption layer to form an extension;
An electrode structure of an electrostatic chuck plate, characterized in that the pair of comb-shaped electrodes are extended on this extension part, and this part is used as an external connection terminal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13548988U JPH0257294U (en) | 1988-10-19 | 1988-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13548988U JPH0257294U (en) | 1988-10-19 | 1988-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0257294U true JPH0257294U (en) | 1990-04-25 |
Family
ID=31395161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13548988U Pending JPH0257294U (en) | 1988-10-19 | 1988-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0257294U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62177818A (en) * | 1985-11-27 | 1987-08-04 | イング・チイ・オリベツチ・アンド・チイ・エス・ピ−・ア | Multilayer static capacity type membrane keyboard |
-
1988
- 1988-10-19 JP JP13548988U patent/JPH0257294U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62177818A (en) * | 1985-11-27 | 1987-08-04 | イング・チイ・オリベツチ・アンド・チイ・エス・ピ−・ア | Multilayer static capacity type membrane keyboard |