JPH0414489U - - Google Patents
Info
- Publication number
- JPH0414489U JPH0414489U JP5521390U JP5521390U JPH0414489U JP H0414489 U JPH0414489 U JP H0414489U JP 5521390 U JP5521390 U JP 5521390U JP 5521390 U JP5521390 U JP 5521390U JP H0414489 U JPH0414489 U JP H0414489U
- Authority
- JP
- Japan
- Prior art keywords
- pair
- conductors
- electrostatic
- adsorption layer
- adsorption device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 claims description 12
- 239000004020 conductor Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Jigs For Machine Tools (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図ないし第７図は本考案の静電吸着装置の
説明図であつて、第１図は本考案の一実施例の導
電体の配置を示す平面説明図、第２図は本考案の
一実施例の構造の説明図、第３図ないし第７図は
印加された導電体の選択を例示する要部説明図、
第８図は静電吸着装置の要部断面説明図、第９図
は静電吸着装置の従来例を示す図である。
１……吸着層、２……選択接続スイツチ、３…
…電源、１０……静電吸着装置、３０……静電吸
着装置、３１……絶縁層、３２……吸着層、３３
……被吸着物、３４，３５……導電体、３６……
電源、ａ，ｂ，ｃ，ｄ……導電体、Ａ，Ｂ，Ｃ，
Ｄ……接続口。
1 to 7 are explanatory diagrams of the electrostatic adsorption device of the present invention, in which FIG. 1 is a plan view showing the arrangement of conductors in an embodiment of the present invention, and FIG. 2 is an explanatory diagram of the electrostatic adsorption device of the present invention. An explanatory diagram of the structure of one embodiment, FIGS. 3 to 7 are explanatory diagrams of main parts illustrating the selection of the applied conductor,
FIG. 8 is an explanatory cross-sectional view of a main part of an electrostatic chuck device, and FIG. 9 is a diagram showing a conventional example of an electrostatic chuck device. 1... Adsorption layer, 2... Selective connection switch, 3...
...power supply, 10...electrostatic adsorption device, 30...electrostatic adsorption device, 31...insulating layer, 32...adsorption layer, 33
...Adsorbed object, 34, 35... Conductor, 36...
Power supply, a, b, c, d... Conductor, A, B, C,
D...Connection port.
Claims (1)
に分離され配設される対の導電体を有し、この対
となる導電体間に印加される直流電圧またはそれ
と等価な電圧による静電的吸引力により前記吸着
層の他側面側に位置される被吸着物を吸着保持す
る静電吸着装置において、 一対となる二個の導電体が配置されて形成され
る電極パターン間に、それら電極パターンに平行
する少なくとも一個の導電体が設けられた吸着板
と、 前記吸着板の少くとも二個以上の導電体に同時
に給電可能な通電手段と を備えたことを特徴とする静電吸着装置。[Claims for Utility Model Registration] A device having a pair of conductors electrically separated from each other within the adsorption layer or on one side of the adsorption layer, and a direct current applied between the pair of conductors. In an electrostatic adsorption device that adsorbs and holds an object located on the other side of the adsorption layer by electrostatic attraction force caused by a voltage or an equivalent voltage, an electrostatic adsorption device is formed by disposing a pair of two conductive bodies. a suction plate in which at least one conductor parallel to the electrode patterns is provided between the electrode patterns; and an energizing means capable of simultaneously supplying power to at least two or more conductors of the suction plate. An electrostatic adsorption device featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990055213U JP2516020Y2 (en) | 1990-05-25 | 1990-05-25 | Electrostatic suction device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990055213U JP2516020Y2 (en) | 1990-05-25 | 1990-05-25 | Electrostatic suction device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0414489U true JPH0414489U (en) | 1992-02-05 |
| JP2516020Y2 JP2516020Y2 (en) | 1996-11-06 |
Family
ID=31577963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990055213U Expired - Lifetime JP2516020Y2 (en) | 1990-05-25 | 1990-05-25 | Electrostatic suction device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2516020Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6164637A (en) * | 1984-09-07 | 1986-04-03 | Fuji Xerox Co Ltd | Paper feeder |
-
1990
- 1990-05-25 JP JP1990055213U patent/JP2516020Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6164637A (en) * | 1984-09-07 | 1986-04-03 | Fuji Xerox Co Ltd | Paper feeder |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2516020Y2 (en) | 1996-11-06 |