JPS64258U - - Google Patents

Info

Publication number
JPS64258U
JPS64258U JP9459987U JP9459987U JPS64258U JP S64258 U JPS64258 U JP S64258U JP 9459987 U JP9459987 U JP 9459987U JP 9459987 U JP9459987 U JP 9459987U JP S64258 U JPS64258 U JP S64258U
Authority
JP
Japan
Prior art keywords
aperture
electron
electron microscope
optimum exposure
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9459987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9459987U priority Critical patent/JPS64258U/ja
Publication of JPS64258U publication Critical patent/JPS64258U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP9459987U 1987-06-22 1987-06-22 Pending JPS64258U (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9459987U JPS64258U (ro) 1987-06-22 1987-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9459987U JPS64258U (ro) 1987-06-22 1987-06-22

Publications (1)

Publication Number Publication Date
JPS64258U true JPS64258U (ro) 1989-01-05

Family

ID=30958222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9459987U Pending JPS64258U (ro) 1987-06-22 1987-06-22

Country Status (1)

Country Link
JP (1) JPS64258U (ro)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH063531U (ja) * 1992-06-15 1994-01-18 松本機械工業株式会社 ロータリーテーブル

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH063531U (ja) * 1992-06-15 1994-01-18 松本機械工業株式会社 ロータリーテーブル

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