JPS6425120A - Luminous flux stabilizing device - Google Patents

Luminous flux stabilizing device

Info

Publication number
JPS6425120A
JPS6425120A JP62182840A JP18284087A JPS6425120A JP S6425120 A JPS6425120 A JP S6425120A JP 62182840 A JP62182840 A JP 62182840A JP 18284087 A JP18284087 A JP 18284087A JP S6425120 A JPS6425120 A JP S6425120A
Authority
JP
Japan
Prior art keywords
luminous flux
split
multiplexing
light
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62182840A
Other languages
Japanese (ja)
Other versions
JP2512873B2 (en
Inventor
Masato Shibuya
Kazumasa Endo
Hideo Mizutani
Gen Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62182840A priority Critical patent/JP2512873B2/en
Publication of JPS6425120A publication Critical patent/JPS6425120A/en
Application granted granted Critical
Publication of JP2512873B2 publication Critical patent/JP2512873B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To reflect one split piece of luminous flux odd times and the other split piece of luminous flux no time or even times, to emit them from an optical multiplexing means, and to remove a shift in the position of the light beam from a light source and variation in its traveling direction optically by guiding the reflected light and transmitted light of incident luminous flux by split light guiding means which are equal in optical path length from the splitting of the two pieces of luminous flux to their multiplexing. CONSTITUTION:A luminous flux optical means consisting of a 1st beam splitter 1 splits the incident luminous flux L0 into the reflected light and transmitted light and a 2nd beam splitter 2 as a luminous flux multiplexing optical means reflects one of two split pieces of luminous flux and transmits the other to multiplex both of them. Further, the split luminous flux guiding means consisting of reflecting mirrors 3-7 reflect the two split pieces of luminous flux and guide them to the multiplexing optical means so that the optical paths from the splitting to the multiplexing are equal in length. Then the number of times of reflection along an incidence plane including the two split pieces of luminous flux is odd as to one split piece of luminous flux and zero or even as to the other.
JP62182840A 1987-07-22 1987-07-22 Luminous flux stabilizer Expired - Lifetime JP2512873B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62182840A JP2512873B2 (en) 1987-07-22 1987-07-22 Luminous flux stabilizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62182840A JP2512873B2 (en) 1987-07-22 1987-07-22 Luminous flux stabilizer

Publications (2)

Publication Number Publication Date
JPS6425120A true JPS6425120A (en) 1989-01-27
JP2512873B2 JP2512873B2 (en) 1996-07-03

Family

ID=16125376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62182840A Expired - Lifetime JP2512873B2 (en) 1987-07-22 1987-07-22 Luminous flux stabilizer

Country Status (1)

Country Link
JP (1) JP2512873B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013541694A (en) * 2010-08-03 2013-11-14 ケーエルエー−テンカー コーポレイション Optical symmetrization for measurement
JP2016161797A (en) * 2015-03-03 2016-09-05 セイコーエプソン株式会社 Transmission type display device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013541694A (en) * 2010-08-03 2013-11-14 ケーエルエー−テンカー コーポレイション Optical symmetrization for measurement
US9164397B2 (en) 2010-08-03 2015-10-20 Kla-Tencor Corporation Optics symmetrization for metrology
JP2016161797A (en) * 2015-03-03 2016-09-05 セイコーエプソン株式会社 Transmission type display device

Also Published As

Publication number Publication date
JP2512873B2 (en) 1996-07-03

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