JPS6425120A - Luminous flux stabilizing device - Google Patents
Luminous flux stabilizing deviceInfo
- Publication number
- JPS6425120A JPS6425120A JP62182840A JP18284087A JPS6425120A JP S6425120 A JPS6425120 A JP S6425120A JP 62182840 A JP62182840 A JP 62182840A JP 18284087 A JP18284087 A JP 18284087A JP S6425120 A JPS6425120 A JP S6425120A
- Authority
- JP
- Japan
- Prior art keywords
- luminous flux
- split
- multiplexing
- light
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Lasers (AREA)
Abstract
PURPOSE:To reflect one split piece of luminous flux odd times and the other split piece of luminous flux no time or even times, to emit them from an optical multiplexing means, and to remove a shift in the position of the light beam from a light source and variation in its traveling direction optically by guiding the reflected light and transmitted light of incident luminous flux by split light guiding means which are equal in optical path length from the splitting of the two pieces of luminous flux to their multiplexing. CONSTITUTION:A luminous flux optical means consisting of a 1st beam splitter 1 splits the incident luminous flux L0 into the reflected light and transmitted light and a 2nd beam splitter 2 as a luminous flux multiplexing optical means reflects one of two split pieces of luminous flux and transmits the other to multiplex both of them. Further, the split luminous flux guiding means consisting of reflecting mirrors 3-7 reflect the two split pieces of luminous flux and guide them to the multiplexing optical means so that the optical paths from the splitting to the multiplexing are equal in length. Then the number of times of reflection along an incidence plane including the two split pieces of luminous flux is odd as to one split piece of luminous flux and zero or even as to the other.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62182840A JP2512873B2 (en) | 1987-07-22 | 1987-07-22 | Luminous flux stabilizer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62182840A JP2512873B2 (en) | 1987-07-22 | 1987-07-22 | Luminous flux stabilizer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6425120A true JPS6425120A (en) | 1989-01-27 |
JP2512873B2 JP2512873B2 (en) | 1996-07-03 |
Family
ID=16125376
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62182840A Expired - Lifetime JP2512873B2 (en) | 1987-07-22 | 1987-07-22 | Luminous flux stabilizer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2512873B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013541694A (en) * | 2010-08-03 | 2013-11-14 | ケーエルエー−テンカー コーポレイション | Optical symmetrization for measurement |
JP2016161797A (en) * | 2015-03-03 | 2016-09-05 | セイコーエプソン株式会社 | Transmission type display device |
-
1987
- 1987-07-22 JP JP62182840A patent/JP2512873B2/en not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013541694A (en) * | 2010-08-03 | 2013-11-14 | ケーエルエー−テンカー コーポレイション | Optical symmetrization for measurement |
US9164397B2 (en) | 2010-08-03 | 2015-10-20 | Kla-Tencor Corporation | Optics symmetrization for metrology |
JP2016161797A (en) * | 2015-03-03 | 2016-09-05 | セイコーエプソン株式会社 | Transmission type display device |
Also Published As
Publication number | Publication date |
---|---|
JP2512873B2 (en) | 1996-07-03 |
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