JPS6422391A - Treatment system for waste water of polishing of silicon wafer - Google Patents
Treatment system for waste water of polishing of silicon waferInfo
- Publication number
- JPS6422391A JPS6422391A JP62177743A JP17774387A JPS6422391A JP S6422391 A JPS6422391 A JP S6422391A JP 62177743 A JP62177743 A JP 62177743A JP 17774387 A JP17774387 A JP 17774387A JP S6422391 A JPS6422391 A JP S6422391A
- Authority
- JP
- Japan
- Prior art keywords
- waste water
- dehydrator
- milk
- lime
- water system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002351 wastewater Substances 0.000 title abstract 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 4
- 238000005498 polishing Methods 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- 239000004744 fabric Substances 0.000 abstract 3
- 239000011863 silicon-based powder Substances 0.000 abstract 3
- 235000008733 Citrus aurantifolia Nutrition 0.000 abstract 2
- 235000011941 Tilia x europaea Nutrition 0.000 abstract 2
- 235000011116 calcium hydroxide Nutrition 0.000 abstract 2
- 239000000920 calcium hydroxide Substances 0.000 abstract 2
- 239000004571 lime Substances 0.000 abstract 2
- 239000008267 milk Substances 0.000 abstract 2
- 210000004080 milk Anatomy 0.000 abstract 2
- 235000013336 milk Nutrition 0.000 abstract 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 238000004065 wastewater treatment Methods 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Filtration Of Liquid (AREA)
Abstract
PURPOSE:To improve the capacity to treat waste water by providing a dehydrator to dehydrate the water in the waste water and connecting a 1st waste water system contg. fine silicon powder and a 2nd waste water system separated and isolated therefrom to the dehydrator in such a manner that the systems can be selected via a pump. CONSTITUTION:Milk 1a of lime formed by, for example, an oxygen waste water treatment in the waste water system 1 is introduced by a press feed pump 3 by opening a selector valve 2 and is fed into the dehydrator 4 by which the milk of lime layer is formed to several millimeter thickness on the filter cloth surface of the dehydrator 4. The waste water 5a contg. the fine silicon powder in the waste water system 5 is fed through the pump 3 into the dehydrator 4 by opening a selector valve 6 upon lapse of the prescribed time and is thereby treated. Since the fine silicon powder does not come into contact with the filter cloth at this time, the filter cloth is hardly clogged. The milk 1a of lime is again fed into the dehydrator in the final of the stage, by which the piping is substd. with the milk of lime and the danger of hydrogen generation, etc., is averted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62177743A JP2621870B2 (en) | 1987-07-16 | 1987-07-16 | Silicon wafer polishing wastewater treatment method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62177743A JP2621870B2 (en) | 1987-07-16 | 1987-07-16 | Silicon wafer polishing wastewater treatment method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6422391A true JPS6422391A (en) | 1989-01-25 |
| JP2621870B2 JP2621870B2 (en) | 1997-06-18 |
Family
ID=16036346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62177743A Expired - Lifetime JP2621870B2 (en) | 1987-07-16 | 1987-07-16 | Silicon wafer polishing wastewater treatment method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2621870B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1055446A2 (en) * | 1999-05-27 | 2000-11-29 | Sanyo Electric Co., Ltd. | Method of fabricating a semiconductor device with process liquid recycling |
| WO2002040407A1 (en) * | 2000-11-17 | 2002-05-23 | Metallkraft As | Method for utilising a waste slurry from silicon wafer production |
| US6406622B1 (en) | 1999-05-27 | 2002-06-18 | Sanyo Electric Co., Ltd. | Apparatus for filtering a fluid |
| US6428709B1 (en) | 1999-05-27 | 2002-08-06 | Sanyo Electric Co., Ltd. | Method of filtering a fluid |
-
1987
- 1987-07-16 JP JP62177743A patent/JP2621870B2/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1055446A2 (en) * | 1999-05-27 | 2000-11-29 | Sanyo Electric Co., Ltd. | Method of fabricating a semiconductor device with process liquid recycling |
| EP1055447A2 (en) * | 1999-05-27 | 2000-11-29 | Sanyo Electric Co., Ltd. | Method of filtering a fluid |
| EP1055445A2 (en) * | 1999-05-27 | 2000-11-29 | Sanyo Electric Co., Ltd. | Apparatus for filtering a fluid |
| EP1055448A2 (en) * | 1999-05-27 | 2000-11-29 | Sanyo Electric Co., Ltd. | Method of filtering a fluid |
| US6406622B1 (en) | 1999-05-27 | 2002-06-18 | Sanyo Electric Co., Ltd. | Apparatus for filtering a fluid |
| US6428709B1 (en) | 1999-05-27 | 2002-08-06 | Sanyo Electric Co., Ltd. | Method of filtering a fluid |
| WO2002040407A1 (en) * | 2000-11-17 | 2002-05-23 | Metallkraft As | Method for utilising a waste slurry from silicon wafer production |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2621870B2 (en) | 1997-06-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19970128 |