JPS6422030U - - Google Patents
Info
- Publication number
- JPS6422030U JPS6422030U JP11740587U JP11740587U JPS6422030U JP S6422030 U JPS6422030 U JP S6422030U JP 11740587 U JP11740587 U JP 11740587U JP 11740587 U JP11740587 U JP 11740587U JP S6422030 U JPS6422030 U JP S6422030U
- Authority
- JP
- Japan
- Prior art keywords
- rising part
- bottomed
- cylindrical
- cylindrical body
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000630 rising effect Effects 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987117405U JPH0625001Y2 (ja) | 1987-07-30 | 1987-07-30 | ウェット処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987117405U JPH0625001Y2 (ja) | 1987-07-30 | 1987-07-30 | ウェット処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6422030U true JPS6422030U (enExample) | 1989-02-03 |
| JPH0625001Y2 JPH0625001Y2 (ja) | 1994-06-29 |
Family
ID=31360838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987117405U Expired - Lifetime JPH0625001Y2 (ja) | 1987-07-30 | 1987-07-30 | ウェット処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0625001Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5586963A (en) * | 1978-12-22 | 1980-07-01 | Hitachi Ltd | Sealing device |
-
1987
- 1987-07-30 JP JP1987117405U patent/JPH0625001Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5586963A (en) * | 1978-12-22 | 1980-07-01 | Hitachi Ltd | Sealing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0625001Y2 (ja) | 1994-06-29 |