JPS6421784U - - Google Patents

Info

Publication number
JPS6421784U
JPS6421784U JP11297987U JP11297987U JPS6421784U JP S6421784 U JPS6421784 U JP S6421784U JP 11297987 U JP11297987 U JP 11297987U JP 11297987 U JP11297987 U JP 11297987U JP S6421784 U JPS6421784 U JP S6421784U
Authority
JP
Japan
Prior art keywords
fluorocarbon
cleaning chamber
cleaning
cleaning device
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11297987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11297987U priority Critical patent/JPS6421784U/ja
Publication of JPS6421784U publication Critical patent/JPS6421784U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP11297987U 1987-07-23 1987-07-23 Pending JPS6421784U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11297987U JPS6421784U (enExample) 1987-07-23 1987-07-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11297987U JPS6421784U (enExample) 1987-07-23 1987-07-23

Publications (1)

Publication Number Publication Date
JPS6421784U true JPS6421784U (enExample) 1989-02-03

Family

ID=31352411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11297987U Pending JPS6421784U (enExample) 1987-07-23 1987-07-23

Country Status (1)

Country Link
JP (1) JPS6421784U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58219980A (ja) * 1982-06-15 1983-12-21 三菱重工業株式会社 洗浄方法及び装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58219980A (ja) * 1982-06-15 1983-12-21 三菱重工業株式会社 洗浄方法及び装置

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