JPS642166U - - Google Patents
Info
- Publication number
- JPS642166U JPS642166U JP9653687U JP9653687U JPS642166U JP S642166 U JPS642166 U JP S642166U JP 9653687 U JP9653687 U JP 9653687U JP 9653687 U JP9653687 U JP 9653687U JP S642166 U JPS642166 U JP S642166U
- Authority
- JP
- Japan
- Prior art keywords
- insulator substrate
- terminal
- high insulator
- mount
- probe card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims description 2
- 239000012212 insulator Substances 0.000 claims 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例を示す斜視図、第２
図は第１図のＡ―Ａ線断面拡大図、第３図はプロ
ーブカードのマウントへの搭載状態を示す平面図
である。 １…ガラス製基板、２…測定用端子、４…コネ
クタピン（接続用端子）、５…加熱体、１０…プ
ローブカードマウント。
図は第１図のＡ―Ａ線断面拡大図、第３図はプロ
ーブカードのマウントへの搭載状態を示す平面図
である。 １…ガラス製基板、２…測定用端子、４…コネ
クタピン（接続用端子）、５…加熱体、１０…プ
ローブカードマウント。
Claims (1)
- 高絶縁体基板に測定用端子とマウントへの接続
用端子とこれら両者を連結するリード線とを有す
るプローブカードにおいて、該高絶縁体基板に加
熱体を設けたことを特徴とするプローブカード。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987096536U JPH0536226Y2 (ja) | 1987-06-25 | 1987-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987096536U JPH0536226Y2 (ja) | 1987-06-25 | 1987-06-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS642166U true JPS642166U (ja) | 1989-01-09 |
| JPH0536226Y2 JPH0536226Y2 (ja) | 1993-09-13 |
Family
ID=30962377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987096536U Expired - Lifetime JPH0536226Y2 (ja) | 1987-06-25 | 1987-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0536226Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012047503A (ja) * | 2010-08-25 | 2012-03-08 | Japan Electronic Materials Corp | プローブカード |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS596552A (ja) * | 1982-07-05 | 1984-01-13 | Hitachi Ltd | 多ピンプロ−バ |
-
1987
- 1987-06-25 JP JP1987096536U patent/JPH0536226Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS596552A (ja) * | 1982-07-05 | 1984-01-13 | Hitachi Ltd | 多ピンプロ−バ |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012047503A (ja) * | 2010-08-25 | 2012-03-08 | Japan Electronic Materials Corp | プローブカード |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0536226Y2 (ja) | 1993-09-13 |