JPS6420722U - - Google Patents

Info

Publication number
JPS6420722U
JPS6420722U JP11483787U JP11483787U JPS6420722U JP S6420722 U JPS6420722 U JP S6420722U JP 11483787 U JP11483787 U JP 11483787U JP 11483787 U JP11483787 U JP 11483787U JP S6420722 U JPS6420722 U JP S6420722U
Authority
JP
Japan
Prior art keywords
substrate
gas
substrate holder
blow
carrier gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11483787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521866Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987114837U priority Critical patent/JPH0521866Y2/ja
Publication of JPS6420722U publication Critical patent/JPS6420722U/ja
Application granted granted Critical
Publication of JPH0521866Y2 publication Critical patent/JPH0521866Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987114837U 1987-07-27 1987-07-27 Expired - Lifetime JPH0521866Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987114837U JPH0521866Y2 (enrdf_load_stackoverflow) 1987-07-27 1987-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987114837U JPH0521866Y2 (enrdf_load_stackoverflow) 1987-07-27 1987-07-27

Publications (2)

Publication Number Publication Date
JPS6420722U true JPS6420722U (enrdf_load_stackoverflow) 1989-02-01
JPH0521866Y2 JPH0521866Y2 (enrdf_load_stackoverflow) 1993-06-04

Family

ID=31355947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987114837U Expired - Lifetime JPH0521866Y2 (enrdf_load_stackoverflow) 1987-07-27 1987-07-27

Country Status (1)

Country Link
JP (1) JPH0521866Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61292913A (ja) * 1985-06-21 1986-12-23 Oki Electric Ind Co Ltd 半導体物品の熱処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61292913A (ja) * 1985-06-21 1986-12-23 Oki Electric Ind Co Ltd 半導体物品の熱処理装置

Also Published As

Publication number Publication date
JPH0521866Y2 (enrdf_load_stackoverflow) 1993-06-04

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