JPS6419470A - Mask pattern input and editing device - Google Patents

Mask pattern input and editing device

Info

Publication number
JPS6419470A
JPS6419470A JP62176187A JP17618787A JPS6419470A JP S6419470 A JPS6419470 A JP S6419470A JP 62176187 A JP62176187 A JP 62176187A JP 17618787 A JP17618787 A JP 17618787A JP S6419470 A JPS6419470 A JP S6419470A
Authority
JP
Japan
Prior art keywords
mask pattern
position information
exposure intensity
pattern
editing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62176187A
Other languages
English (en)
Other versions
JPH07104874B2 (ja
Inventor
Yoshihiko Hirai
Kazuji Ikeda
Sadafumi Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62176187A priority Critical patent/JPH07104874B2/ja
Publication of JPS6419470A publication Critical patent/JPS6419470A/ja
Publication of JPH07104874B2 publication Critical patent/JPH07104874B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Position Input By Displaying (AREA)
JP62176187A 1987-07-15 1987-07-15 マスクパタン入力編集装置 Expired - Lifetime JPH07104874B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62176187A JPH07104874B2 (ja) 1987-07-15 1987-07-15 マスクパタン入力編集装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62176187A JPH07104874B2 (ja) 1987-07-15 1987-07-15 マスクパタン入力編集装置

Publications (2)

Publication Number Publication Date
JPS6419470A true JPS6419470A (en) 1989-01-23
JPH07104874B2 JPH07104874B2 (ja) 1995-11-13

Family

ID=16009169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62176187A Expired - Lifetime JPH07104874B2 (ja) 1987-07-15 1987-07-15 マスクパタン入力編集装置

Country Status (1)

Country Link
JP (1) JPH07104874B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006259157A (ja) * 2005-03-16 2006-09-28 Matsushita Electric Ind Co Ltd マスクデータ生成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006259157A (ja) * 2005-03-16 2006-09-28 Matsushita Electric Ind Co Ltd マスクデータ生成方法

Also Published As

Publication number Publication date
JPH07104874B2 (ja) 1995-11-13

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