JPS6419103U - - Google Patents
Info
- Publication number
- JPS6419103U JPS6419103U JP11313587U JP11313587U JPS6419103U JP S6419103 U JPS6419103 U JP S6419103U JP 11313587 U JP11313587 U JP 11313587U JP 11313587 U JP11313587 U JP 11313587U JP S6419103 U JPS6419103 U JP S6419103U
- Authority
- JP
- Japan
- Prior art keywords
- light
- light reflected
- measured
- reflecting mirror
- irradiated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000001427 coherent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11313587U JPS6419103U (enrdf_load_stackoverflow) | 1987-07-23 | 1987-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11313587U JPS6419103U (enrdf_load_stackoverflow) | 1987-07-23 | 1987-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6419103U true JPS6419103U (enrdf_load_stackoverflow) | 1989-01-31 |
Family
ID=31352704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11313587U Pending JPS6419103U (enrdf_load_stackoverflow) | 1987-07-23 | 1987-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6419103U (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS524260A (en) * | 1975-06-28 | 1977-01-13 | Canon Inc | Physical factor measuring system |
| JPS6176902A (ja) * | 1984-09-25 | 1986-04-19 | Yamazaki Mazak Corp | 非接触形プロ−ブ |
-
1987
- 1987-07-23 JP JP11313587U patent/JPS6419103U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS524260A (en) * | 1975-06-28 | 1977-01-13 | Canon Inc | Physical factor measuring system |
| JPS6176902A (ja) * | 1984-09-25 | 1986-04-19 | Yamazaki Mazak Corp | 非接触形プロ−ブ |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4022532A (en) | Sample point interferometric system for optical figure monitoring | |
| US5260761A (en) | Apparatus for the measurement of surface shape | |
| US4504147A (en) | Angular alignment sensor | |
| CN105674875B (zh) | 一种全视场低频外差点衍射干涉仪 | |
| US20160238631A1 (en) | Optical knife-edge detector with large dynamic range | |
| JP2533514B2 (ja) | 凹部深さ・膜厚測定装置 | |
| US3664739A (en) | Method and device for measuring strain and other changes in dimension | |
| JPS6419103U (enrdf_load_stackoverflow) | ||
| US4687332A (en) | Self-referencing scan-shear interferometer | |
| US5327220A (en) | IR interferometric apparatus and method for determining the thickness variation of an optical part wherein said optical part defines Newton interference fringe patterns | |
| JPS6338091B2 (enrdf_load_stackoverflow) | ||
| US5100227A (en) | Translation insensitive keratometer using moire deflectometry | |
| JPH0623922Y2 (ja) | 厚さ監視装置 | |
| JP2780868B2 (ja) | 放散的に反射する対象物の表面輪郭を決定する方法および装置 | |
| JPH0454405A (ja) | 光学式変位計 | |
| JP2923859B2 (ja) | 屈折率測定装置 | |
| JPH0512753Y2 (enrdf_load_stackoverflow) | ||
| JPH0243638U (enrdf_load_stackoverflow) | ||
| JP2502092B2 (ja) | 干渉装置 | |
| JPS61105805U (enrdf_load_stackoverflow) | ||
| JPH02110813U (enrdf_load_stackoverflow) | ||
| JPH01107905U (enrdf_load_stackoverflow) | ||
| JPH02110301A (ja) | レーザ測長器 | |
| JPH0438246Y2 (enrdf_load_stackoverflow) | ||
| JPS58100721A (ja) | フ−リエ変換型赤外分光光度計 |