JPS641903A - Apparatus for measuring depth - Google Patents
Apparatus for measuring depthInfo
- Publication number
- JPS641903A JPS641903A JP15537387A JP15537387A JPS641903A JP S641903 A JPS641903 A JP S641903A JP 15537387 A JP15537387 A JP 15537387A JP 15537387 A JP15537387 A JP 15537387A JP S641903 A JPS641903 A JP S641903A
- Authority
- JP
- Japan
- Prior art keywords
- reflected
- recess
- mirror
- arrow
- beam splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To measure the depth of a recess by making nearly equal the reflected beam from the surface of recess and that from the bottom face of recess being based on the space between two types of interference fringes corresponding to the surface and bottom face of recess.
CONSTITUTION: A parallel beam 8 in the direction of arrow 5a which has not been spectrally separated by the beam splitter 7a is reflected independently by the bottom face B and surface S of groove-like recess 30 of sample 1. The reflected beam 23S out of reflected beams 23B and 23S in the direction of arrow 23 interferes with the reflected beam 10b produced by allowing the parallel beam 10a which was spectrally separated in the direction of arrow 8a to be reflected in the direction of arrow 21a by the mirror 11a by the beam splitter 7a. In this case, the mirror 11a is moved in the direction of optical axis to make an adjustment so that the strength of interference beams 23S' and 23B' returned from the beam splitter 7a to the beam splitter 6a by moving the mirror 11a in the direction of optical axis may be equal. Thus, the depth is measured by the interference beams 23B' and 23S' which were made to be equal and the interference beams 25a and 25b with the reflected beam 10c from the mirror 11.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-155373A JPH011903A (en) | 1987-06-24 | depth measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-155373A JPH011903A (en) | 1987-06-24 | depth measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS641903A true JPS641903A (en) | 1989-01-06 |
JPH011903A JPH011903A (en) | 1989-01-06 |
Family
ID=
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0545519A2 (en) * | 1991-12-04 | 1993-06-09 | Mitsubishi Denki Kabushiki Kaisha | Non-contact measuring method for step difference and device therefor |
JP2011518312A (en) * | 2007-12-14 | 2011-06-23 | インテクプラス カンパニー、リミテッド | 3D shape measuring device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0545519A2 (en) * | 1991-12-04 | 1993-06-09 | Mitsubishi Denki Kabushiki Kaisha | Non-contact measuring method for step difference and device therefor |
JP2011518312A (en) * | 2007-12-14 | 2011-06-23 | インテクプラス カンパニー、リミテッド | 3D shape measuring device |
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