JPS641903A - Apparatus for measuring depth - Google Patents

Apparatus for measuring depth

Info

Publication number
JPS641903A
JPS641903A JP15537387A JP15537387A JPS641903A JP S641903 A JPS641903 A JP S641903A JP 15537387 A JP15537387 A JP 15537387A JP 15537387 A JP15537387 A JP 15537387A JP S641903 A JPS641903 A JP S641903A
Authority
JP
Japan
Prior art keywords
reflected
recess
mirror
arrow
beam splitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15537387A
Other languages
Japanese (ja)
Other versions
JPH011903A (en
Inventor
Akira Tsumura
Masakazu Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62-155373A priority Critical patent/JPH011903A/en
Priority claimed from JP62-155373A external-priority patent/JPH011903A/en
Publication of JPS641903A publication Critical patent/JPS641903A/en
Publication of JPH011903A publication Critical patent/JPH011903A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To measure the depth of a recess by making nearly equal the reflected beam from the surface of recess and that from the bottom face of recess being based on the space between two types of interference fringes corresponding to the surface and bottom face of recess.
CONSTITUTION: A parallel beam 8 in the direction of arrow 5a which has not been spectrally separated by the beam splitter 7a is reflected independently by the bottom face B and surface S of groove-like recess 30 of sample 1. The reflected beam 23S out of reflected beams 23B and 23S in the direction of arrow 23 interferes with the reflected beam 10b produced by allowing the parallel beam 10a which was spectrally separated in the direction of arrow 8a to be reflected in the direction of arrow 21a by the mirror 11a by the beam splitter 7a. In this case, the mirror 11a is moved in the direction of optical axis to make an adjustment so that the strength of interference beams 23S' and 23B' returned from the beam splitter 7a to the beam splitter 6a by moving the mirror 11a in the direction of optical axis may be equal. Thus, the depth is measured by the interference beams 23B' and 23S' which were made to be equal and the interference beams 25a and 25b with the reflected beam 10c from the mirror 11.
COPYRIGHT: (C)1989,JPO&Japio
JP62-155373A 1987-06-24 depth measuring device Pending JPH011903A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62-155373A JPH011903A (en) 1987-06-24 depth measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62-155373A JPH011903A (en) 1987-06-24 depth measuring device

Publications (2)

Publication Number Publication Date
JPS641903A true JPS641903A (en) 1989-01-06
JPH011903A JPH011903A (en) 1989-01-06

Family

ID=

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0545519A2 (en) * 1991-12-04 1993-06-09 Mitsubishi Denki Kabushiki Kaisha Non-contact measuring method for step difference and device therefor
JP2011518312A (en) * 2007-12-14 2011-06-23 インテクプラス カンパニー、リミテッド 3D shape measuring device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0545519A2 (en) * 1991-12-04 1993-06-09 Mitsubishi Denki Kabushiki Kaisha Non-contact measuring method for step difference and device therefor
JP2011518312A (en) * 2007-12-14 2011-06-23 インテクプラス カンパニー、リミテッド 3D shape measuring device

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