JPS6418728U - - Google Patents
Info
- Publication number
- JPS6418728U JPS6418728U JP11336387U JP11336387U JPS6418728U JP S6418728 U JPS6418728 U JP S6418728U JP 11336387 U JP11336387 U JP 11336387U JP 11336387 U JP11336387 U JP 11336387U JP S6418728 U JPS6418728 U JP S6418728U
- Authority
- JP
- Japan
- Prior art keywords
- inlet
- valve
- switching valve
- outlet switching
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000007789 gas Substances 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11336387U JPS6418728U (de) | 1987-07-23 | 1987-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11336387U JPS6418728U (de) | 1987-07-23 | 1987-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418728U true JPS6418728U (de) | 1989-01-30 |
Family
ID=31353132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11336387U Pending JPS6418728U (de) | 1987-07-23 | 1987-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418728U (de) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5522861A (en) * | 1978-08-07 | 1980-02-18 | Semiconductor Res Found | Thin film growth method |
| JPS5670631A (en) * | 1979-11-14 | 1981-06-12 | Fujitsu Ltd | Doping device of impurity |
| JPS59208822A (ja) * | 1983-05-10 | 1984-11-27 | レイセオン カンパニ− | 半導体構造物および製造方法 |
-
1987
- 1987-07-23 JP JP11336387U patent/JPS6418728U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5522861A (en) * | 1978-08-07 | 1980-02-18 | Semiconductor Res Found | Thin film growth method |
| JPS5670631A (en) * | 1979-11-14 | 1981-06-12 | Fujitsu Ltd | Doping device of impurity |
| JPS59208822A (ja) * | 1983-05-10 | 1984-11-27 | レイセオン カンパニ− | 半導体構造物および製造方法 |
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