JPH03103251U - - Google Patents
Info
- Publication number
- JPH03103251U JPH03103251U JP1243090U JP1243090U JPH03103251U JP H03103251 U JPH03103251 U JP H03103251U JP 1243090 U JP1243090 U JP 1243090U JP 1243090 U JP1243090 U JP 1243090U JP H03103251 U JPH03103251 U JP H03103251U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- sample chamber
- reaction vessel
- reaction
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 14
- 230000002265 prevention Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 21
- 238000010574 gas phase reaction Methods 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 2
Landscapes
- Glanulating (AREA)
- Powder Metallurgy (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1243090U JPH03103251U (de) | 1990-02-09 | 1990-02-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1243090U JPH03103251U (de) | 1990-02-09 | 1990-02-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03103251U true JPH03103251U (de) | 1991-10-28 |
Family
ID=31515908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1243090U Pending JPH03103251U (de) | 1990-02-09 | 1990-02-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03103251U (de) |
-
1990
- 1990-02-09 JP JP1243090U patent/JPH03103251U/ja active Pending
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