JPS641849U - - Google Patents
Info
- Publication number
- JPS641849U JPS641849U JP9599087U JP9599087U JPS641849U JP S641849 U JPS641849 U JP S641849U JP 9599087 U JP9599087 U JP 9599087U JP 9599087 U JP9599087 U JP 9599087U JP S641849 U JPS641849 U JP S641849U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- substrate
- conveying
- substrate during
- conveyance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003380 propellant Substances 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Description
第１図は本考案の一実施例を示す構成図、第２
図は第１図のＡ―Ａ線における断面図である。
１……送りローラ（搬送手段）、３……バフ（
研摩手段）、１５……噴射体（保護手段）。
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a sectional view taken along line AA in FIG. 1. 1...Feed roller (conveyance means), 3...Buff (
polishing means), 15... propellant (protection means).
Claims (1)
素子形成部を狭圧して搬送する搬送手段と、上記
基板の裏面を上記搬送中に研摩する研摩手段と、
上記研摩中に上記基板上の素子を保護する保護手
段とを備えたことを特徴とする基板研摩装置。 a conveying means for compressing and conveying a non-element forming part of a substrate having a plurality of semiconductor elements formed on its surface; a polishing means for polishing a back surface of the substrate during the conveyance;
A substrate polishing apparatus comprising: protection means for protecting elements on the substrate during the polishing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9599087U JPS641849U (en) | 1987-06-24 | 1987-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9599087U JPS641849U (en) | 1987-06-24 | 1987-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS641849U true JPS641849U (en) | 1989-01-09 |
Family
ID=30961220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9599087U Pending JPS641849U (en) | 1987-06-24 | 1987-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS641849U (en) |
-
1987
- 1987-06-24 JP JP9599087U patent/JPS641849U/ja active Pending