JPS6418002U - - Google Patents

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Publication number
JPS6418002U
JPS6418002U JP11246087U JP11246087U JPS6418002U JP S6418002 U JPS6418002 U JP S6418002U JP 11246087 U JP11246087 U JP 11246087U JP 11246087 U JP11246087 U JP 11246087U JP S6418002 U JPS6418002 U JP S6418002U
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JP
Japan
Prior art keywords
shutter
gutter
screen
guide plate
opened
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11246087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11246087U priority Critical patent/JPS6418002U/ja
Publication of JPS6418002U publication Critical patent/JPS6418002U/ja
Pending legal-status Critical Current

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JP11246087U 1987-07-21 1987-07-21 Pending JPS6418002U (pt)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11246087U JPS6418002U (pt) 1987-07-21 1987-07-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11246087U JPS6418002U (pt) 1987-07-21 1987-07-21

Publications (1)

Publication Number Publication Date
JPS6418002U true JPS6418002U (pt) 1989-01-30

Family

ID=31351415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11246087U Pending JPS6418002U (pt) 1987-07-21 1987-07-21

Country Status (1)

Country Link
JP (1) JPS6418002U (pt)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7812965B2 (en) 2006-12-11 2010-10-12 Zygo Corporation Multiple-degree of freedom interferometer with compensation for gas effects
US7812964B2 (en) 2006-11-15 2010-10-12 Zygo Corporation Distance measuring interferometer and encoder metrology systems for use in lithography tools
US7826063B2 (en) 2005-04-29 2010-11-02 Zygo Corporation Compensation of effects of atmospheric perturbations in optical metrology
US7894075B2 (en) 2006-12-11 2011-02-22 Zygo Corporation Multiple-degree of freedom interferometer with compensation for gas effects

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7826063B2 (en) 2005-04-29 2010-11-02 Zygo Corporation Compensation of effects of atmospheric perturbations in optical metrology
US7812964B2 (en) 2006-11-15 2010-10-12 Zygo Corporation Distance measuring interferometer and encoder metrology systems for use in lithography tools
US7812965B2 (en) 2006-12-11 2010-10-12 Zygo Corporation Multiple-degree of freedom interferometer with compensation for gas effects
US7894075B2 (en) 2006-12-11 2011-02-22 Zygo Corporation Multiple-degree of freedom interferometer with compensation for gas effects

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