JPS6417371A - Spectrum display unit in x-ray microanalyzer, etc. - Google Patents
Spectrum display unit in x-ray microanalyzer, etc.Info
- Publication number
- JPS6417371A JPS6417371A JP17235787A JP17235787A JPS6417371A JP S6417371 A JPS6417371 A JP S6417371A JP 17235787 A JP17235787 A JP 17235787A JP 17235787 A JP17235787 A JP 17235787A JP S6417371 A JPS6417371 A JP S6417371A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- sample
- distributed
- displayed
- types
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To aim at improvement in analytic accuracy in case of qualitative analysis by installing a device, which displays two types of spectrum waveforms based on X-rays from the same detected by both X-ray detectors of a wavelength distributed X-ray spectrometer and an energy distributed X-ray detector, on the same image plane. CONSTITUTION:The surface of a sample 5 is irradiated by an electron beam, detecting X-rays being generated out of the sample by X-ray detectors 9 and 13, and a spectrum is displayed. And, two types of spectrum waveforms based on the X-ray out of the same sample detected by both X-ray detectors of wavelength distributed X-ray spectrometers 8, 9 and 10 and energy distributed X-ray detectors 13 and 14 are displayed on the same image plane 15. With this constitution, two types of X-ray spectrum waveforms collected by these wavelength distributed X-ray spectrometers and energy distributed X-ray detectors are displayed on the same image plane, and elements being contained in the sample are accurately identified so that qualitative analysis can be done.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17235787A JPS6417371A (en) | 1987-07-10 | 1987-07-10 | Spectrum display unit in x-ray microanalyzer, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17235787A JPS6417371A (en) | 1987-07-10 | 1987-07-10 | Spectrum display unit in x-ray microanalyzer, etc. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6417371A true JPS6417371A (en) | 1989-01-20 |
Family
ID=15940404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17235787A Pending JPS6417371A (en) | 1987-07-10 | 1987-07-10 | Spectrum display unit in x-ray microanalyzer, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6417371A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005001804A1 (en) | 2003-06-30 | 2005-01-06 | Sony Corporation | Flat display unit |
| WO2019239497A1 (en) * | 2018-06-12 | 2019-12-19 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5537754A (en) * | 1978-09-11 | 1980-03-15 | Hitachi Ltd | Scanning electronic microscope or its similar device |
| JPS5965751A (en) * | 1982-10-08 | 1984-04-14 | Hitachi Ltd | X-ray microanalyzer |
| JPS60257051A (en) * | 1984-06-01 | 1985-12-18 | Hitachi Ltd | Energy dispersion type x-ray detector |
-
1987
- 1987-07-10 JP JP17235787A patent/JPS6417371A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5537754A (en) * | 1978-09-11 | 1980-03-15 | Hitachi Ltd | Scanning electronic microscope or its similar device |
| JPS5965751A (en) * | 1982-10-08 | 1984-04-14 | Hitachi Ltd | X-ray microanalyzer |
| JPS60257051A (en) * | 1984-06-01 | 1985-12-18 | Hitachi Ltd | Energy dispersion type x-ray detector |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005001804A1 (en) | 2003-06-30 | 2005-01-06 | Sony Corporation | Flat display unit |
| WO2019239497A1 (en) * | 2018-06-12 | 2019-12-19 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3919548A (en) | X-Ray energy spectrometer system | |
| JPS6417369A (en) | Spectrum display unit in x-ray microanalyzer and the like | |
| US6353656B1 (en) | Radioisotope based x-ray residual stress analysis apparatus | |
| GB2324861A (en) | X-ray fluorescence analyzer | |
| US4417355A (en) | X-Ray fluorescence spectrometer | |
| GB1303343A (en) | ||
| DE3062151D1 (en) | Element analysis unit | |
| JPS6417371A (en) | Spectrum display unit in x-ray microanalyzer, etc. | |
| JPS57197454A (en) | X-ray analysing apparatus | |
| EP0766083A2 (en) | X-ray fluorescence inspection apparatus and method | |
| DE3585533D1 (en) | METHOD AND DEVICE FOR CONDITION ANALYSIS. | |
| US6596994B1 (en) | Beam position monitor | |
| JP3375754B2 (en) | Liquid sample holding device and liquid sample analyzer | |
| GB1456083A (en) | Gamma ray spectrometer display means | |
| JPS57197410A (en) | Measuring method of adhered amount of high polymer film on metallic plate | |
| RU2095883C1 (en) | Electroluminescent gas detector | |
| JPS55121140A (en) | Photoelectric spectroscope | |
| Alexander | X-ray fluorescence analysis of biological tissues | |
| Li et al. | A PIXE system for routine longitudinal scanning of single hair strands | |
| CN208063139U (en) | A kind of solar cell test sub-ray spectrometer | |
| US3408496A (en) | Alpha ray excited composition analysis | |
| JPS5912563Y2 (en) | Fluorescent X-ray coating thickness analyzer | |
| JPS646850A (en) | Method and instrument for measuring element concentration distribution | |
| JPS54109897A (en) | Specimen analytical apparatus in scanning electron microscope or the like | |
| Krause et al. | X-RAY ANALYSIS BY PHOTOELECTRON SPECTROMETRY. |