JPS6417351A - Manufacture of secondary electron multiplier - Google Patents
Manufacture of secondary electron multiplierInfo
- Publication number
- JPS6417351A JPS6417351A JP17321887A JP17321887A JPS6417351A JP S6417351 A JPS6417351 A JP S6417351A JP 17321887 A JP17321887 A JP 17321887A JP 17321887 A JP17321887 A JP 17321887A JP S6417351 A JPS6417351 A JP S6417351A
- Authority
- JP
- Japan
- Prior art keywords
- secondary electron
- cylinder
- resistance value
- metallic oxide
- electron multiplier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE:To make it possible to realize highly efficiency secondary electron multiplication effect by successively increasing, from an input terminal side to an output terminal side, a resistance value of an oxide layer of aluminum or titanium with a high emission ratio of secondary electrons deposited on the inner surface of a cylinder. CONSTITUTION:The secondary electron multiplier in the caption is formed through those processes in which aluminum or titanium metal 13 becoming a metallic oxide with a high secondary electron emission ratio is decomposed and deposited on the inner surface of an insulating cylinder 12 by CVD method, a hollow part of the cylinder 12 is filled with liquid with a boiling point less than a thermal oxidation treatment temperature after sealing one opening of the cylinder 12, a secondary electron emitting layer of a metallic oxide with successive resistance value distribution is formed by thermally oxidating a coating metal 13 in fluid of oxidizing gas and removing a sealing body. Accordingly, a high efficient secondary electron multiplier can be obtained, because it is possible to successively change, from an incident side to an emitting side, the resistance value of the secondary electron emitting layer made of metallic oxide 13 on the inner surface of the cylinder 12.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17321887A JPS6417351A (en) | 1987-07-10 | 1987-07-10 | Manufacture of secondary electron multiplier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17321887A JPS6417351A (en) | 1987-07-10 | 1987-07-10 | Manufacture of secondary electron multiplier |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6417351A true JPS6417351A (en) | 1989-01-20 |
Family
ID=15956319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17321887A Pending JPS6417351A (en) | 1987-07-10 | 1987-07-10 | Manufacture of secondary electron multiplier |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6417351A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013172417A1 (en) * | 2012-05-18 | 2013-11-21 | 浜松ホトニクス株式会社 | Microchannel plate |
-
1987
- 1987-07-10 JP JP17321887A patent/JPS6417351A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013172417A1 (en) * | 2012-05-18 | 2013-11-21 | 浜松ホトニクス株式会社 | Microchannel plate |
| US9117640B2 (en) | 2012-05-18 | 2015-08-25 | Hamamatsu Photonics K.K. | Microchannel plate having a main body, image intensifier, ion detector, and inspection device |
| JPWO2013172417A1 (en) * | 2012-05-18 | 2016-01-12 | 浜松ホトニクス株式会社 | Micro channel plate |
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