JPS6416052U - - Google Patents
Info
- Publication number
- JPS6416052U JPS6416052U JP11102087U JP11102087U JPS6416052U JP S6416052 U JPS6416052 U JP S6416052U JP 11102087 U JP11102087 U JP 11102087U JP 11102087 U JP11102087 U JP 11102087U JP S6416052 U JPS6416052 U JP S6416052U
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical body
- hot cathode
- ion source
- axial direction
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11102087U JPS6416052U (OSRAM) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11102087U JPS6416052U (OSRAM) | 1987-07-20 | 1987-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6416052U true JPS6416052U (OSRAM) | 1989-01-26 |
Family
ID=31348708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11102087U Pending JPS6416052U (OSRAM) | 1987-07-20 | 1987-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6416052U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03222241A (ja) * | 1990-01-25 | 1991-10-01 | Tokyo Electron Ltd | イオン源装置 |
-
1987
- 1987-07-20 JP JP11102087U patent/JPS6416052U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03222241A (ja) * | 1990-01-25 | 1991-10-01 | Tokyo Electron Ltd | イオン源装置 |
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