JPS6415989A - Minute displacement element and displacement control circuit using minute displacement element - Google Patents

Minute displacement element and displacement control circuit using minute displacement element

Info

Publication number
JPS6415989A
JPS6415989A JP62171124A JP17112487A JPS6415989A JP S6415989 A JPS6415989 A JP S6415989A JP 62171124 A JP62171124 A JP 62171124A JP 17112487 A JP17112487 A JP 17112487A JP S6415989 A JPS6415989 A JP S6415989A
Authority
JP
Japan
Prior art keywords
displacement
voltage
piezoelectric
electrodes
minute
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62171124A
Other languages
Japanese (ja)
Inventor
Naoki Takizawa
Makoto Higomura
Akinobu Deguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62171124A priority Critical patent/JPS6415989A/en
Publication of JPS6415989A publication Critical patent/JPS6415989A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To enable the simple control of displacement, by manufacturing a minute displacement element by laminating piezoelectric material and capacitors to detect surface charge of the piezoelectric material, forming a displacement control circuit applying the above element, and performing open loop control. CONSTITUTION:Capacitors 1A are constituted of lamination-type piezoelectric elements and electrodes 4, 5, and have capacitances C1-Cn. One or more piezoelectric elements 1 are used. A capacitor 2A is constituted of dielectric material and electrodes 5, 6, and has capacitance Ck. Electric charge Q equal to the charge injected to the piezoelectric element 1 is charged in the dielectric material 2, and a voltage Vc generates between the electrodes 5 and 6. Since x=kQ= kCkVc, the displacement (expansion and contraction) of the piezoelectric element 1 is controlled, and positioning control is performed, by detecting the voltage between terminals of the electrode 5, feeding it back via a voltage amplifying circuit 10, and applying a difference voltage from an aiming value converted to a voltage, to the piezoelectric element 1.
JP62171124A 1987-07-10 1987-07-10 Minute displacement element and displacement control circuit using minute displacement element Pending JPS6415989A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62171124A JPS6415989A (en) 1987-07-10 1987-07-10 Minute displacement element and displacement control circuit using minute displacement element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62171124A JPS6415989A (en) 1987-07-10 1987-07-10 Minute displacement element and displacement control circuit using minute displacement element

Publications (1)

Publication Number Publication Date
JPS6415989A true JPS6415989A (en) 1989-01-19

Family

ID=15917429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62171124A Pending JPS6415989A (en) 1987-07-10 1987-07-10 Minute displacement element and displacement control circuit using minute displacement element

Country Status (1)

Country Link
JP (1) JPS6415989A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0658578U (en) * 1992-11-11 1994-08-12 祥一 野本 Conversion plug
JP2010158128A (en) * 2008-12-28 2010-07-15 Saitama Univ Drive system and drive method of equivalent capacity actuator
JP2010236974A (en) * 2009-03-31 2010-10-21 Mechano Transformer Corp Method of evaluating measurement of mechanical output of piezoelectric actuator, control method, and device using the methods

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0658578U (en) * 1992-11-11 1994-08-12 祥一 野本 Conversion plug
JP2010158128A (en) * 2008-12-28 2010-07-15 Saitama Univ Drive system and drive method of equivalent capacity actuator
JP2010236974A (en) * 2009-03-31 2010-10-21 Mechano Transformer Corp Method of evaluating measurement of mechanical output of piezoelectric actuator, control method, and device using the methods

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