JPS6415989A - Minute displacement element and displacement control circuit using minute displacement element - Google Patents
Minute displacement element and displacement control circuit using minute displacement elementInfo
- Publication number
- JPS6415989A JPS6415989A JP62171124A JP17112487A JPS6415989A JP S6415989 A JPS6415989 A JP S6415989A JP 62171124 A JP62171124 A JP 62171124A JP 17112487 A JP17112487 A JP 17112487A JP S6415989 A JPS6415989 A JP S6415989A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- voltage
- piezoelectric
- electrodes
- minute
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To enable the simple control of displacement, by manufacturing a minute displacement element by laminating piezoelectric material and capacitors to detect surface charge of the piezoelectric material, forming a displacement control circuit applying the above element, and performing open loop control. CONSTITUTION:Capacitors 1A are constituted of lamination-type piezoelectric elements and electrodes 4, 5, and have capacitances C1-Cn. One or more piezoelectric elements 1 are used. A capacitor 2A is constituted of dielectric material and electrodes 5, 6, and has capacitance Ck. Electric charge Q equal to the charge injected to the piezoelectric element 1 is charged in the dielectric material 2, and a voltage Vc generates between the electrodes 5 and 6. Since x=kQ= kCkVc, the displacement (expansion and contraction) of the piezoelectric element 1 is controlled, and positioning control is performed, by detecting the voltage between terminals of the electrode 5, feeding it back via a voltage amplifying circuit 10, and applying a difference voltage from an aiming value converted to a voltage, to the piezoelectric element 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62171124A JPS6415989A (en) | 1987-07-10 | 1987-07-10 | Minute displacement element and displacement control circuit using minute displacement element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62171124A JPS6415989A (en) | 1987-07-10 | 1987-07-10 | Minute displacement element and displacement control circuit using minute displacement element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6415989A true JPS6415989A (en) | 1989-01-19 |
Family
ID=15917429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62171124A Pending JPS6415989A (en) | 1987-07-10 | 1987-07-10 | Minute displacement element and displacement control circuit using minute displacement element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6415989A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0658578U (en) * | 1992-11-11 | 1994-08-12 | 祥一 野本 | Conversion plug |
JP2010158128A (en) * | 2008-12-28 | 2010-07-15 | Saitama Univ | Drive system and drive method of equivalent capacity actuator |
JP2010236974A (en) * | 2009-03-31 | 2010-10-21 | Mechano Transformer Corp | Method of evaluating measurement of mechanical output of piezoelectric actuator, control method, and device using the methods |
-
1987
- 1987-07-10 JP JP62171124A patent/JPS6415989A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0658578U (en) * | 1992-11-11 | 1994-08-12 | 祥一 野本 | Conversion plug |
JP2010158128A (en) * | 2008-12-28 | 2010-07-15 | Saitama Univ | Drive system and drive method of equivalent capacity actuator |
JP2010236974A (en) * | 2009-03-31 | 2010-10-21 | Mechano Transformer Corp | Method of evaluating measurement of mechanical output of piezoelectric actuator, control method, and device using the methods |
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