JPS6415373A - Ventilation method for semiconductor vapor growth system - Google Patents
Ventilation method for semiconductor vapor growth systemInfo
- Publication number
- JPS6415373A JPS6415373A JP16988887A JP16988887A JPS6415373A JP S6415373 A JPS6415373 A JP S6415373A JP 16988887 A JP16988887 A JP 16988887A JP 16988887 A JP16988887 A JP 16988887A JP S6415373 A JPS6415373 A JP S6415373A
- Authority
- JP
- Japan
- Prior art keywords
- air
- emergency
- clean room
- blower
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To assure safety in the event of an accident and to prevent air pollution by stopping, in the event of emergency of a titled system, the taking-in of the air from a clean room to an air conditioner, making emergency supply of the no-polluted air into the clean room and increasing the discharge rate from a force discharge duct. CONSTITUTION:The air conditioner 9 is operated to feed the air into the clean room where cabinets 3-5 contg. a reaction furnace, gas supply source and gas control apparatus are housed in the normal time or at the time of exchanging the gas supply system. Poisonous gases are then treated by a waste gas treating machine 16 via the force discharge duct 7 and thereafter the gas are released into the atm. by a ventilation blower 17 for use in the normal time or a ventilation blower 20 for use at the time of exchanging the gas supply source. On the other hand, the air conditioner 9 and blower 17 are stopped by the signals from respective sensors and an emergency ventilation blower 18 and an emergency air supply blower 22 are driven to supply the clean air through a filter 23 into the clean room 2 in the vent of emergency. The air in the clean room is simultaneously introduced through a flour surface 2A, a spacer 12 under the floor in the room 2 to the inside of the cabinets 3-5 and after the air is cleaned up with the waste gas treating machine 16 through the duct 7, the air is released from the blower 18 into the atm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16988887A JPH07116604B2 (en) | 1987-07-09 | 1987-07-09 | Ventilation method of semiconductor vapor phase growth system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16988887A JPH07116604B2 (en) | 1987-07-09 | 1987-07-09 | Ventilation method of semiconductor vapor phase growth system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6415373A true JPS6415373A (en) | 1989-01-19 |
JPH07116604B2 JPH07116604B2 (en) | 1995-12-13 |
Family
ID=15894817
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16988887A Expired - Fee Related JPH07116604B2 (en) | 1987-07-09 | 1987-07-09 | Ventilation method of semiconductor vapor phase growth system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07116604B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002033297A (en) * | 2000-07-17 | 2002-01-31 | Seiko Epson Corp | Exhausting unit, manufacturing treatment equipment and exhaust system |
US8128792B2 (en) | 2002-09-20 | 2012-03-06 | Toyo Tanso Co., Ltd. | Fluorine gas generator |
-
1987
- 1987-07-09 JP JP16988887A patent/JPH07116604B2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002033297A (en) * | 2000-07-17 | 2002-01-31 | Seiko Epson Corp | Exhausting unit, manufacturing treatment equipment and exhaust system |
US8128792B2 (en) | 2002-09-20 | 2012-03-06 | Toyo Tanso Co., Ltd. | Fluorine gas generator |
Also Published As
Publication number | Publication date |
---|---|
JPH07116604B2 (en) | 1995-12-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |